scholarly journals Effects of ultraviolet photon irradiation and subsequent thermal treatments on solution-processed amorphous indium gallium zinc oxide thin films

AIP Advances ◽  
2018 ◽  
Vol 8 (11) ◽  
pp. 115304 ◽  
Author(s):  
Yuki Takamori ◽  
Takaaki Morimoto ◽  
Nobuko Fukuda ◽  
Yoshimichi Ohki
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Thermal Treatments ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Solution Processed ◽  
Photon Irradiation ◽  
Indium Gallium

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

2012 ◽  
Vol 14 (10) ◽  
pp. 915-918 ◽  
Author(s):  
Yanbin Zheng ◽  
Guang Li ◽  
Wenlong Wang ◽  
Xiuchang Li ◽  
Zhigang Jiang
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Dry Etching ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Indium Gallium
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