A monitoring device made of an anodic aluminum oxide template for plasma-induced charging potential measurements in the high-aspect-ratio trench structure
2006 ◽
Vol 13
(5-6)
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pp. 601-606
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2017 ◽
Vol 5
(7)
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pp. 1706-1713
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2019 ◽
Vol 368
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pp. 138-147
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2011 ◽
Vol 158
(1)
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pp. E1
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2012 ◽
Vol 28
(06)
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pp. 1545-1550
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