A monitoring device made of an anodic aluminum oxide template for plasma-induced charging potential measurements in the high-aspect-ratio trench structure

2018 ◽  
Vol 89 (11) ◽  
pp. 115006
Author(s):  
Ji-Hwan Park ◽  
Chin-Wook Chung
2006 ◽  
Vol 13 (5-6) ◽  
pp. 601-606 ◽  
Author(s):  
Dong Sung Kim ◽  
Hyun Sup Lee ◽  
Junghyun Lee ◽  
Sungjoo Kim ◽  
Kun-Hong Lee ◽  
...  

2017 ◽  
Vol 1 (1) ◽  
pp. 24-29
Author(s):  
Po-Chun Chen ◽  
Youwei Jiang ◽  
Dawen Li ◽  
Jun Zou ◽  
Xing Cheng

Anodic aluminum oxide (AAO) templates possess highly-ordered nanoporous structures, with advantages such as high aspect ratio. However, there are limits to control the growth of the traditional AAO arrays, such as interpore distance, pore sizes and densities. In this study, we introduce an innovative nanoimprint process guided AAO fabrication to overcome these limitations of the traditional AAO arrays.


2017 ◽  
Vol 5 (7) ◽  
pp. 1706-1713 ◽  
Author(s):  
C. V. Manzano ◽  
G. Bürki ◽  
L. Pethö ◽  
J. Michler ◽  
L. Philippe

ZnO nanowires electrodeposited into anodic aluminum oxide (AAO) templates exhibit a high filling ratio and aspect ratio. A diffusion mechanism, which depends on electrodeposition parameters is proposed.


2019 ◽  
Vol 368 ◽  
pp. 138-147 ◽  
Author(s):  
Dequan Wu ◽  
Dawei Zhang ◽  
Yuwei Ye ◽  
Lingwei Ma ◽  
Badar Minhas ◽  
...  

2020 ◽  
Vol 9 ◽  
pp. 100071
Author(s):  
Takaki Okamoto ◽  
Tomohiro Shimizu ◽  
Koichi Takase ◽  
Takeshi Ito ◽  
Shoso Shingubara

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