Deposition of diamond-like carbon films by laser ablation

1996 ◽  
Author(s):  
Mitsugu Hanabusa ◽  
Kiyohito Tsujihara
2004 ◽  
Vol 222 (1-4) ◽  
pp. 226-233 ◽  
Author(s):  
Gabriel Dumitru ◽  
Valerio Romano ◽  
Heinz P Weber ◽  
Sergei Pimenov ◽  
Taras Kononenko ◽  
...  

2003 ◽  
Vol 208-209 ◽  
pp. 553-560 ◽  
Author(s):  
A.-S. Loir ◽  
F. Garrelie ◽  
J.-L. Subtil ◽  
F. Goutaland ◽  
M. Belin ◽  
...  

2004 ◽  
Vol 188-189 ◽  
pp. 728-734 ◽  
Author(s):  
A.S. Loir ◽  
F. Garrelie ◽  
C. Donnet ◽  
F. Rogemond ◽  
J.L. Subtil ◽  
...  

2000 ◽  
Vol 376 (1-2) ◽  
pp. 1-4 ◽  
Author(s):  
Sharif Mohammad Mominuzzaman ◽  
Tetsuo Soga ◽  
Takashi Jimbo ◽  
Masayoshi Umeno

1992 ◽  
Vol 285 ◽  
Author(s):  
S. Leppävuori ◽  
J. Levoska ◽  
J. Vaara ◽  
O. Kusmartseva

ABSTRACTDiamond-like carbon (DLC) thin films were prepared by laser ablation deposition. The deposition process was carried out in a vacuum chamber at a base pressure of about 10−5 mbar using the focused beam from either an Nd:YAG laser or an XeCl excimer laser and a pyrolytic graphite target. The peak power density of the laser beam was about 108 W/cm2, and 1010 W/cm2. respectively. The effect of varying power density of the laser beam also was examined. The films were deposited on fused silica and silicon single crystal substrates between room temperature and 600 °C with and without hydrogen addition. The properties of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman and Fourier transform infrared (FTIR) spectrometry, electrical conductivity and optical measurements. The best films were insulating (σ<10−6 Ω−1 cm−1), hard, partly transparent (optical gap 1.3 − 2.2 eV) and smooth without any particulates on the surface.


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