Laser Ablation Deposition of Diamond-Like Carbon Films

1992 ◽  
Vol 285 ◽  
Author(s):  
S. Leppävuori ◽  
J. Levoska ◽  
J. Vaara ◽  
O. Kusmartseva
Keyword(s):  
Laser Ablation ◽  
Laser Beam ◽  
Power Density ◽  
Pyrolytic Graphite ◽  
Deposition Process ◽  
Carbon Films ◽  
Fused Silica ◽  
Optical Measurements ◽  
Diamond Like Carbon ◽  
X Ray Diffraction

ABSTRACTDiamond-like carbon (DLC) thin films were prepared by laser ablation deposition. The deposition process was carried out in a vacuum chamber at a base pressure of about 10−5 mbar using the focused beam from either an Nd:YAG laser or an XeCl excimer laser and a pyrolytic graphite target. The peak power density of the laser beam was about 108 W/cm2, and 1010 W/cm2. respectively. The effect of varying power density of the laser beam also was examined. The films were deposited on fused silica and silicon single crystal substrates between room temperature and 600 °C with and without hydrogen addition. The properties of the films were characterized by scanning electron microscopy (SEM), X-ray diffraction (XRD), micro-Raman and Fourier transform infrared (FTIR) spectrometry, electrical conductivity and optical measurements. The best films were insulating (σ<10−6 Ω−1 cm−1), hard, partly transparent (optical gap 1.3 − 2.2 eV) and smooth without any particulates on the surface.

Mechanical Properties of Laser Processed Diamond-Like Carbon Films

1995 ◽  
Vol 397 ◽  
Author(s):  
Ashok Kumar ◽  
R. B. Inturi ◽  
Y. Vohra ◽  
U. Ekanayake ◽  
N. Shu ◽  
...  
Keyword(s):  
Mechanical Properties ◽  
Room Temperature ◽  
Pyrolytic Graphite ◽  
High Vacuum ◽  
Pulsed Laser ◽  
Chemical Properties ◽  
High Hardness ◽  
Deposition Process ◽  
Carbon Films ◽  
Diamond Like Carbon

ABSTRACTDiamond-like carbon (DLC) films have a unique combination of physical and chemical properties such as high hardness, optical transparency, low coefficient of friction and chemical inertness. A pulsed laser (248 nm) has been used to ablate a pyrolytic graphite target to deposit DLC films on Si (100) and 7059 Corning glass substrates. The deposition was carried out in high vacuum (≤ 10−6 Torr) at different temperatures ranging from room temperature to 400°C. The films were characterized by x-ray diffraction, scanning electron microscope, and Raman spectroscopie techniques. The mechanical properties (hardness and Young's modulus) of these films were characterized by nanoindentation. We have found that the films deposited at room temperature and 100°C show the characteristic features of DLC films and have the better hardness and modulus properties compared to the films fabricated at higher temperatures, which transform into amorphous carbon. Correlations of pulsed laser deposition process parameters with the properties of deposited DLC films will be discussed in this paper.

scholarly journals Effect of the laser power density on the properties and structures of the diamond-like carbon films deposited by pulsed laser ablation of graphite

2005 ◽  
Vol 54 (9) ◽  
pp. 4294
Author(s):  
Peng Hong-Yan ◽  
Zhou Chuan-Sheng ◽  
Zhao Li-Xin ◽  
Jin Zeng-Sun ◽  
Zhang Bing ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Power Density ◽  
Laser Power ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Carbon Films ◽  
Laser Power Density ◽  
Diamond Like Carbon

Atomic Oxygen Plasma Effects on Cvd Deposited Diamond-Like Carbon Films

1991 ◽  
Vol 236 ◽  
Author(s):  
Jeffrey S. Hale ◽  
R.A. Synowicki ◽  
S. Nafis ◽  
John A. Woollam
Keyword(s):  
Atomic Oxygen ◽  
Moisture Absorption ◽  
Crystalline Silicon ◽  
Carbon Films ◽  
Fused Silica ◽  
Low Earth Orbit ◽  
Index Of Refraction ◽  
Earth Orbit ◽  
Diamond Like Carbon ◽  
Space Flights

AbstractCVD deposited diamond-like carbon (DLC) films have been studied for possible use as a secondary standard for Low Earth Orbit materials degradation. Samples of various thicknesses have been exposed to a simulated Low Earth Orbit atomic oxygen (AO) environment using a plasma asher. Mass loss measurements indicate that DLC degrades at a rate of 0.7 mg/hr which is two to three times the rate of currently used Kapton samples which degrade at a rate of.3 mg/hr. Thickness measurements show that DLC thins at a rate of 77 Angstroms/min. Since DLC is not as susceptible to environmental factors such as moisture absorption, it could potentially provide more accurate measurements of AO fluence on short space flights. Adhesion of DLC films to both fused silica and crystalline silicon substrates has been studied under thermal cycling conditions. Film adhesion to fused silica can be enhanced by sputtering a thin layer of silicon dioxide onto the substrate prior to deposition. In addition to the above, the index of refraction and extinction coefficient of various thicknesses of DLC films has been characterized by Variable Angle Spectroscopic Ellipsometry.

Band structure of diamond-like carbon films assessed from optical measurements in wide spectral range

2010 ◽  
Vol 19 (2-3) ◽  
pp. 114-122 ◽  
Author(s):  
Daniel Franta ◽  
David Nečas ◽  
Lenka Zajíčková ◽  
Vilma Buršíková ◽  
Christoph Cobet
Keyword(s):  
Band Structure ◽  
Spectral Range ◽  
Carbon Films ◽  
Optical Measurements ◽  
Diamond Like Carbon ◽  
Wide Spectral Range

Femtosecond laser ablation of diamond-like carbon films

2004 ◽  
Vol 222 (1-4) ◽  
pp. 226-233 ◽  
Author(s):  
Gabriel Dumitru ◽  
Valerio Romano ◽  
Heinz P Weber ◽  
Sergei Pimenov ◽  
Taras Kononenko ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Femtosecond Laser ◽  
Femtosecond Laser Ablation ◽  
Carbon Films ◽  
Diamond Like Carbon

Study of plasma expansion induced by femtosecond pulsed laser ablation and deposition of diamond-like carbon films

2003 ◽  
Vol 208-209 ◽  
pp. 553-560 ◽  
Author(s):  
A.-S. Loir ◽  
F. Garrelie ◽  
J.-L. Subtil ◽  
F. Goutaland ◽  
M. Belin ◽  
...  
Keyword(s):  
Laser Ablation ◽  
Pulsed Laser ◽  
Pulsed Laser Ablation ◽  
Carbon Films ◽  
Diamond Like Carbon ◽  
Plasma Expansion ◽  
Femtosecond Pulsed Laser

Atomic Oxygen Plasma Effects on CVD Deposited Diamond-Like Carbon Films

1991 ◽  
Vol 235 ◽  
Author(s):  
Jeffrey S. Hale ◽  
R. A. Synowicki ◽  
S. Nails ◽  
John A. Woollam
Keyword(s):  
Atomic Oxygen ◽  
Moisture Absorption ◽  
Crystalline Silicon ◽  
Carbon Films ◽  
Fused Silica ◽  
Low Earth Orbit ◽  
Index Of Refraction ◽  
Earth Orbit ◽  
Diamond Like Carbon ◽  
Space Flights

ABSTRACTCVD deposited diamond-like carbon (DLC) films have been studied for possible use as a secondary standard for Low Earth Orbit materials degradation. Samples of various thicknesses have been exposed to a simulated Low Earth Orbit atomic oxygen (AO) environment using a plasma asher. Mass loss measurements indicate that DLC degrades at a rate of 0.7 mg/hr which is two to three times the rate of currently used Kapton samples which degrade at a rate of.3 mg/hr. Thickness measurements show that DLC thins at a rate of 77 Angstroms/min. Since DLC is not as susceptible to environmental factors such as moisture absorption, it could potentially provide more accurate measurements of AO fluence on short space flights. Adhesion of DLC films to both fused silica and crystalline silicon substrates has been studied under thermal cycling conditions. Film adhesion to fused silica can be enhanced by sputtering a thin layer of silicon dioxide onto the substrate prior to deposition. In addition to the above, the index of refraction and extinction coefficient of various thicknesses of DLC films has been characterized by Variable Angle Spectroscopic Ellipsometry.

Synthesis and control of micro to noanscale porous structures of diamond like carbon films

2006 ◽  
Vol 954 ◽  
Author(s):  
Peter Feng ◽  
Ben Yang ◽  
H. X. Zhang ◽  
X. P. Wang ◽  
Noel Upia ◽  
...  
Keyword(s):  
Power Density ◽  
Laser Power ◽  
Carbon Films ◽  
Laser Power Density ◽  
Diamond Like Carbon ◽  
Excimer Laser Ablation ◽  
Target Yield ◽  
Krf Excimer Laser ◽  
And Control ◽  
The Relationship

ABSTRACTDiamond like carbon (DLC) films are synthesized on various substrates using a pulsed KrF excimer laser ablation deposition technique. Variations of laser power density, substrate temperature, angle and distance between the substrate and target yield different sizes of porous surfaces of DLC films. Microscope is used to examine the surfaces. Raman scattering is used to characterize the samples, and the typical G and D bands have been identified. Intensities and profiles of the G and D bands closely depend on laser power density. The relationship between the deposition rate and the power density is also studied.

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