Enhancement on crystallinity property of low annealed PbTiO3 thin films for metal-insulator-metal capacitor

2018 ◽  
Author(s):  
Z. Nurbaya ◽  
M. H. Wahid ◽  
M. D. Rozana ◽  
S. A. H. Alrokayan ◽  
H. A. Khan ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Insulator ◽  
Metal Insulator Metal

Atomic Vapor Depositions of Ti–Ta–O thin films for Metal–Insulator–Metal applications

2011 ◽  
Vol 519 (11) ◽  
pp. 3831-3834 ◽  
Author(s):  
M. Lukosius ◽  
C. Baristiran Kaynak ◽  
Ch. Wenger ◽  
G. Ruhl ◽  
S. Rushworth ◽  
...  
Keyword(s):  
Thin Films ◽  
Atomic Vapor ◽  
Metal Insulator ◽  
Metal Insulator Metal

Comparison of Multilayer Dielectric Thin Films for Future Metal–Insulator–Metal Capacitors: Al2O3/HfO2/Al2O3versus SiO2/HfO2/SiO2

2011 ◽  
Vol 50 (10S) ◽  
pp. 10PB06 ◽  
Author(s):  
Sang-Uk Park ◽  
Hyuk-Min Kwon ◽  
In-Shik Han ◽  
Yi-Jung Jung ◽  
Ho-Young Kwak ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Insulator ◽  
Dielectric Thin Films ◽  
Metal Insulator Metal ◽  
Multilayer Dielectric

Investigation of the Divided Deposition Method of TiN Thin Films for Metal–Insulator–Metal Capacitor Applications

2005 ◽  
Vol 44 (11) ◽  
pp. 7765-7769 ◽  
Author(s):  
Tomonori Okudaira ◽  
Takeshi Hayashi ◽  
Shinsuke Sakashita ◽  
Junichi Tsuchimoto ◽  
Kiyoteru Kobayashi ◽  
...  
Keyword(s):  
Thin Films ◽  
Deposition Method ◽  
Metal Insulator ◽  
Metal Insulator Metal ◽  
Tin Thin Films
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