scholarly journals Laser-to-droplet alignment sensitivity relevant for laser-produced plasma sources of extreme ultraviolet light

2018 ◽  
Vol 124 (1) ◽  
pp. 013102 ◽  
Author(s):  
Sten A. Reijers ◽  
Dmitry Kurilovich ◽  
Francesco Torretti ◽  
Hanneke Gelderblom ◽  
Oscar O. Versolato
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Plasma Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

scholarly journals Development of Extreme-Ultraviolet Light Source by Laser-Produced Plasma

2008 ◽  
Vol 36 (APLS) ◽  
pp. 1125-1128 ◽  
Author(s):  
Hiroaki NISHIMURA ◽  
Shinsuke FUJIOKA ◽  
Masashi SHIMOMURA ◽  
Hirokazu SAKAGUCHI ◽  
Yuki NAKAI ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Behavior of debris from laser-produced plasma for extreme ultraviolet light source measured by laser imaging technique

2006 ◽  
Vol 89 (18) ◽  
pp. 181109 ◽  
Author(s):  
Hiroki Tanaka ◽  
Yuki Hashimoto ◽  
Kouji Tamaru ◽  
Akihiko Takahashi ◽  
Tatsuo Okada
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Imaging Technique ◽  
Laser Imaging ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

Laser produced plasma for efficient extreme ultraviolet light sources

2012 ◽  
Author(s):  
Tony Donnelly ◽  
Thomas Cummins ◽  
Colm O' Gorman ◽  
Bowen Li ◽  
Colm S. Harte ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light

scholarly journals EUV (Extreme Ultraviolet) Light Source by Laser Produced Plasma Using Tin Through-hole Targets

2009 ◽  
Vol 75 (8) ◽  
pp. 967-972
Author(s):  
Motohiro NAKANO ◽  
Yasuyuki SANDA ◽  
Haruyuki INOUE ◽  
Yasushi OSHIKANE ◽  
Toshihiko KATAOKA
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light ◽  
Through Hole

scholarly journals Optimum laser-produced plasma for extreme ultraviolet light source

2008 ◽  
Vol 112 (4) ◽  
pp. 042049 ◽  
Author(s):  
S Fujioka ◽  
H Nishimura ◽  
M Shimomura ◽  
H Sakaguchi ◽  
Y Nakai ◽  
...  
Keyword(s):  
Light Source ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Laser Produced Plasma ◽  
Extreme Ultraviolet Light
Sign in / Sign up

Export Citation Format

Share Document