Simulation of a large size inductively coupled plasma generator and comparison with experimental data
2013 ◽
Vol 34
(6)
◽
pp. 066004
◽
2019 ◽
Vol 14
(07)
◽
pp. T07007-T07007
2008 ◽
Vol 36
(4)
◽
pp. 1930-1936
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2010 ◽
Vol 208
◽
pp. 012056
◽
2019 ◽
Vol 85
(1II))
◽
pp. 82-85
◽
2010 ◽
Vol 8
(ists27)
◽
pp. Pe_47-Pe_51
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