scholarly journals Effects of vacuum rapid thermal annealing on the electrical characteristics of amorphous indium gallium zinc oxide thin films

AIP Advances ◽  
2018 ◽  
Vol 8 (1) ◽  
pp. 015007 ◽  
Author(s):  
Hyun-Woo Lee ◽  
Won-Ju Cho
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Indium Gallium Zinc Oxide ◽  
Electrical Characteristics ◽  
Oxide Thin Films ◽  
Indium Gallium

Effect of rapid thermal annealing on texture and properties of pulsed laser deposited zinc oxide thin films

2013 ◽  
Vol 98 ◽  
pp. 149-152 ◽  
Author(s):  
K.C. Sekhar ◽  
S. Levichev ◽  
Koppole Kamakshi ◽  
S. Doyle ◽  
A. Chahboun ◽  
...  
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Thermal Annealing ◽  
Rapid Thermal Annealing ◽  
Pulsed Laser ◽  
Oxide Thin Films

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

2012 ◽  
Vol 14 (10) ◽  
pp. 915-918 ◽  
Author(s):  
Yanbin Zheng ◽  
Guang Li ◽  
Wenlong Wang ◽  
Xiuchang Li ◽  
Zhigang Jiang
Keyword(s):  
Thin Films ◽  
Zinc Oxide ◽  
Dry Etching ◽  
Indium Gallium Zinc Oxide ◽  
Oxide Thin Films ◽  
Indium Gallium
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