Strain-driven diffusion process during silicon oxidation investigated by coupling density functional theory and activation relaxation technique
2017 ◽
Vol 147
(5)
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pp. 054701
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2007 ◽
Vol 131-133
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pp. 265-270
2019 ◽
Vol 21
(44)
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pp. 24478-24488
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Keyword(s):
Keyword(s):
1998 ◽