Leakage current induced by surfactant residues in self-assembly based ultralow-k dielectric materials

Accelerated temperature and voltage stress tests were conducted on embedded planar capacitors with epoxy–BaTiO3 composite dielectric. The failure modes were found to be a sudden increase in the leakage current across the capacitor dielectric and a gradual decrease in the capacitance. The failure mechanisms associated with these failure modes were investigated by performing data analysis and failure analysis. The time-to-failure as a result of a sudden increase in the leakage current was modeled using the Prokopowicz equation. The values of constants of the Prokopowicz equation, n and Ea, were determined for the epoxy–BaTiO3 composite. The degradation in capacitance was modeled by performing regression analysis. The time-to-failure and degradation models can be used for the qualification tests of embedded planar capacitors, for the development of new composite dielectric materials, and to improve the manufacturing processes of these capacitors.

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Engineering implication of the correlation between the leakage current in high-k dielectric materials and the electronic defect states detected by zero-bias thermally stimulated current spectroscopy

2018 China Semiconductor Technology International Conference (CSTIC) ◽

10.1109/cstic.2018.8369248 ◽

2018 ◽

Cited By ~ 1

Author(s):

W. S. Lau

Keyword(s):

Leakage Current ◽

Dielectric Materials ◽

Defect States ◽

Thermally Stimulated Current ◽

Zero Bias ◽

High K ◽

Thermally Stimulated Current Spectroscopy ◽

Electronic Defect ◽

High K Dielectric

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Fabrication of Photonic Crystal Based on Polystyrene Particles

Materials Science Forum ◽

10.4028/www.scientific.net/msf.827.271 ◽

2015 ◽

Vol 827 ◽

pp. 271-275 ◽

Cited By ~ 2

Author(s):

Lusi Safriani ◽

Ian Sopian ◽

Tuti Susilawati ◽

Sahrul Hidayat

Keyword(s):

Photonic Crystal ◽

Photonic Crystals ◽

Self Assembly ◽

Flexible Substrate ◽

Stop Band ◽

3D Structure ◽

Dielectric Materials ◽

Filling Fraction ◽

Future Technology ◽

Assembly Method

Photonic crystals are dielectric materials with different refractive index or permittivity periodically. Photonic crystals have widely application for future technology such as waveguide, optical transistor, cavity of laser and biosensor. Photonic crystals can be fabricated in three types i.e 1D, 2D and 3D structure. In this paper, we report the successful fabrication of 3D photonic crystal from polystyrene particles. The fabrication process began with the synthesis of polystyrene particles followed by deposition on glass and flexible substrate using self-assembly method. We obtained polystyrene monodispered particles which have a uniform shaped with diameter 320 nm. Self-assembly method resulted to the arrangement of polystyrene particles on glass and flexible substrate. Stop band which is related to its optical property are at wavelength of 721 nm and 631 nm for photonic crystal on glass and flexible substrate, respectively. We found that filling fraction of photonic crystal on flexible substrate is lower than that of glass substrate due to some defects.

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Spin-on Gate Dielectric Materials for Next Generation Display Systems

MRS Proceedings ◽

10.1557/proc-0936-l11-03 ◽

2006 ◽

Vol 936 ◽

Author(s):

Jinghong Chen ◽

Mehari Stifanos ◽

Jan Nedbal ◽

Ahila Krishnamoorthy ◽

Emma Brouk ◽

...

Keyword(s):

Thin Film ◽

Dielectric Constant ◽

Leakage Current ◽

Breakdown Voltage ◽

Thin Film Transistors ◽

Gate Dielectric ◽

Dielectric Materials ◽

Curing Temperature ◽

Type I ◽

Display Systems

ABSTRACTWe present recent advances on spin-on polymers as gate dielectric for thin film transistors. We have developed film type I with significantly improved dielectric properties. At a curing temperature of 250 °C, the dielectric constant is 3.46, the breakdown voltage is 4.10 MV/cm at 1 μA/cm2, the leakage current is 4.9 × 10−8 A/cm2 at 2.5 MV/cm, and the CV hysteresis is 3.4 V. At a curing temperature of 425 °C, the dielectric constant, the breakdown voltage, the leakage current, and the CV hysteresis are 3.2, 4.73 MV/cm, 2.6 × 10−8 A/cm2, and 0.44 V respectively.

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Comparative high-k material gate spacer impact in DG-FinFET parameter variations between two structures

Indonesian Journal of Electrical Engineering and Computer Science ◽

10.11591/ijeecs.v14.i2.pp573-580 ◽

2019 ◽

Vol 14 (2) ◽

pp. 573

Author(s):

Ameer F. Roslan ◽

F. Salehuddin ◽

A.S. M. Zain ◽

K.E. Kaharudin ◽

I. Ahmad ◽

...

Keyword(s):

Leakage Current ◽

Dielectric Materials ◽

Structure Design ◽

Short Channel ◽

Design Modification ◽

Drive Current ◽

Minimum Requirement ◽

High K ◽

High K Materials ◽

The Impact

This paper investigates the impact of the high-K material gate spacer on short channel effects (SCEs) for the 16 nm double-gate FinFET (DG-FinFET), where depletion-layer widths of the source-drain corresponds to the channel length. Virtual fabrication process along with design modification throughout the study and its electrical characterization is implemented and significant improvement is shown towards the altered structure design whereby in terms of the ratio of drive current against the leakage current (ION/IOFF ratio), all three materials tested being S3N4, HfO2 and TiO2 increases from the respective 60.90, 80.70 and 84.77 to 84.77, 91.54 and 92.69. That being said, the incremental in ratio has satisfied the incremental on the drive current as well as decreases the leakage current. Threshold voltage (VTH) for all dielectric materials have also satisfy the minimum requirement predicted by the International Technology Roadmap Semiconductor (ITRS) 2013 for which is at 0.461±12.7% V. Based on the results obtained, the high-K materials have shown a significant improvement, specifically after the modifications towards the Source/Drain. Compared to the initial design made, TiO2 has improved by 12.94% after the alteration made in terms of the overall ION and IOFF performances through the ION/IOFF ratio value obtained, as well as meeting the required value for VTH obtained at 0.464V. The ION from high-K materials has proved to meet the minimum requirement by ITRS 2013 for low performance Multi-Gate technology.

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In vitro and in vivo polysaccharides assembly: ultrastructural and cytochemical study of growing plant cell wall components.

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100083035 ◽

1978 ◽

Vol 36 (2) ◽

pp. 434-435

Author(s):

D. Reis ◽

B. Vian ◽

J. C. Roland

Keyword(s):

Cell Wall ◽

Self Assembly ◽

Plant Cell Wall ◽

Higher Plants ◽

Three Dimensional ◽

Cytochemical Study ◽

Wall Components

Wall morphogenesis in higher plants is a problem still open to controversy. Until now the possibility of a transmembrane control and the involvement of microtubules were mostly envisaged. Self-assembly processes have been observed in the case of walls of Chlamydomonas and bacteria. Spontaneous gelling interactions between xanthan and galactomannan from Ceratonia have been analyzed very recently. The present work provides indications that some processes of spontaneous aggregation could occur in higher plants during the formation and expansion of cell wall.Observations were performed on hypocotyl of mung bean (Phaseolus aureus) for which growth characteristics and wall composition have been previously defined.In situ, the walls of actively growing cells (primary walls) show an ordered three-dimensional organization (fig. 1). The wall is typically polylamellate with multifibrillar layers alternately transverse and longitudinal. Between these layers intermediate strata exist in which the orientation of microfibrils progressively rotates. Thus a progressive change in the morphogenetic activity occurs.

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The Nature of Rapidly Extracted Phycocyanin from the Blue-Green Alga Plectonema Boryanum

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s0424820100065870 ◽

1971 ◽

Vol 29 ◽

pp. 366-367

Author(s):

M. Kessel ◽

R. MacColl

Keyword(s):

Self Assembly ◽

Analytical Ultracentrifugation ◽

Uranyl Acetate ◽

The Self ◽

Major Protein ◽

Subunit Structure ◽

Blue Green Alga ◽

Thin Sections ◽

Blue Green Algae ◽

Cacodylate Buffer

The major protein of the blue-green algae is the biliprotein, C-phycocyanin (Amax = 620 nm), which is presumed to exist in the cell in the form of distinct aggregates called phycobilisomes. The self-assembly of C-phycocyanin from monomer to hexamer has been extensively studied, but the proposed next step in the assembly of a phycobilisome, the formation of 19s subunits, is completely unknown. We have used electron microscopy and analytical ultracentrifugation in combination with a method for rapid and gentle extraction of phycocyanin to study its subunit structure and assembly.To establish the existence of phycobilisomes, cells of P. boryanum in the log phase of growth, growing at a light intensity of 200 foot candles, were fixed in 2% glutaraldehyde in 0.1M cacodylate buffer, pH 7.0, for 3 hours at 4°C. The cells were post-fixed in 1% OsO4 in the same buffer overnight. Material was stained for 1 hour in uranyl acetate (1%), dehydrated and embedded in araldite and examined in thin sections.

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Video real-time imaging of artificial membranes during freeze-drying by cryo-electron microscopy

Proceedings, annual meeting, Electron Microscopy Society of America ◽

10.1017/s042482010010216x ◽

1988 ◽

Vol 46 ◽

pp. 16-17

Author(s):

Alan S. Rudolph ◽

Ronald R. Price

Keyword(s):

Real Time ◽

Self Assembly ◽

Freeze Drying ◽

Video Capture ◽

Drying Process ◽

Artificial Membranes ◽

The Past ◽

Cryo Electron Microscopy ◽

Spherical Structures ◽

Capture Techniques

We have employed cryoelectron microscopy to visualize events that occur during the freeze-drying of artificial membranes by employing real time video capture techniques. Artificial membranes or liposomes which are spherical structures within internal aqueous space are stabilized by water which provides the driving force for spontaneous self-assembly of these structures. Previous assays of damage to these structures which are induced by freeze drying reveal that the two principal deleterious events that occur are 1) fusion of liposomes and 2) leakage of contents trapped within the liposome [1]. In the past the only way to access these events was to examine the liposomes following the dehydration event. This technique allows the event to be monitored in real time as the liposomes destabilize and as water is sublimed at cryo temperatures in the vacuum of the microscope. The method by which liposomes are compromised by freeze-drying are largely unknown. This technique has shown that cryo-protectants such as glycerol and carbohydrates are able to maintain liposomal structure throughout the drying process.

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