Theoretical study on the influence of photon reabsorption on spatially resolved photocarrier radiometric imaging of silicon wafers

2017 ◽  
Vol 122 (16) ◽  
pp. 165702 ◽  
Author(s):  
Qian Wang ◽  
Weiguo Liu
2015 ◽  
Vol 5 (6) ◽  
pp. 1840-1843 ◽  
Author(s):  
Mattias Klaus Juhl ◽  
Thorsten Trupke ◽  
Malcolm Abbott ◽  
Bernhard Mitchell

1997 ◽  
Vol 491 (1) ◽  
pp. 395-401 ◽  
Author(s):  
Peng Li ◽  
James M. McTiernan ◽  
A. Gordon Emslie

1998 ◽  
Vol 41 (5) ◽  
pp. 36-43 ◽  
Author(s):  
Sheng-Bai Zhu

In an earlier paper ["Theoretical Study of Molecular Contaminants on Silicon wafers: Interactions Between Molecular Contaminants and the Silicon Surface," Journal of the IEST, July/August 1998] a simple formulation was developed to describe interactions between gas phase molecules and solid surfaces.1 Adsorption energies of various organic/inorganic molecules on silicon wafer surfaces were derived, In this paper, the relationship between the gas phase molecule concentration and the surface contamination density based on simple kinetic theories is established. The most important approximations in this derivation include the neglect of possible chemical reactions on the surface and the assumption that gas phase concentrations of pollutants are constants, both in time and in location. The mass transport mechanisms are ignored. With these approximations, the equilibrium in surface kinetics can be reached almost instantly for all the molecules investigated, even for those having activation energies as high as ∼ 72 kJ/mole. This agrees with the experimental data for moisture adsorption on stainless steel.2 A guide is provided for material selection.


2020 ◽  
Vol 10 (2) ◽  
pp. 585-594 ◽  
Author(s):  
Shuai Nie ◽  
Sissel Tind Kristensen ◽  
Alexander Gu ◽  
Robert Lee Chin ◽  
Thorsten Trupke ◽  
...  

2003 ◽  
Vol 94 (6) ◽  
pp. 4139-4143 ◽  
Author(s):  
Martin C. Schubert ◽  
Joerg Isenberg ◽  
Wilhelm Warta

2019 ◽  
Vol 68 (4) ◽  
pp. 047201
Author(s):  
Qian Wang ◽  
Wei-Guo Liu ◽  
Lei Gong ◽  
Li-Guo Wang ◽  
Ya-Qing Li ◽  
...  

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