Thickness engineering of atomic layer deposited Al2O3 films to suppress interfacial reaction and diffusion of Ni/Au gate metal in AlGaN/GaN HEMTs up to 600 °C in air
Keyword(s):
2002 ◽
Vol 20
(6)
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pp. 2361
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2004 ◽
Vol 151
(1)
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pp. G18
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Keyword(s):
2010 ◽
Vol 85
(7-9)
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pp. 992-997
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Keyword(s):
2019 ◽
Vol 470
◽
pp. 854-860
◽
2019 ◽
Keyword(s):