High capacitance density of 185 nF/mm2 achieved in three-dimensional MIM structures using TiO2 as a dielectric
2010 ◽
Vol 2010
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pp. 000847-000854
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2019 ◽
Vol 26
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pp. 650-658
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2014 ◽
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pp. 13845-13853
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2009 ◽
Vol 51
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2016 ◽
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pp. 13458-13465
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