Role of oxygen and nitrogen in n-type microcrystalline silicon carbide grown by hot wire chemical vapor deposition

Manuel Pomaska; Jan Mock; Florian Köhler; Uwe Zastrow; Martina Perani; Oleksandr Astakhov; Daniela Cavalcoli; Reinhard Carius; Friedhelm Finger; Kaining Ding

doi:10.1063/1.4971402

Role of oxygen and nitrogen in n-type microcrystalline silicon carbide grown by hot wire chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.4971402 ◽

2016 ◽

Vol 120 (22) ◽

pp. 225105 ◽

Cited By ~ 4

Author(s):

Manuel Pomaska ◽

Jan Mock ◽

Florian Köhler ◽

Uwe Zastrow ◽

Martina Perani ◽

...

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Microcrystalline Silicon

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The role of hydrogen dilution of silane and phosphorus doping on hydrogenated microcrystalline silicon (μc-Si:H) films prepared by hot-wire chemical vapor deposition (HW-CVD) technique

Thin Solid Films ◽

10.1016/s0040-6090(01)01269-x ◽

2001 ◽

Vol 395 (1-2) ◽

pp. 206-212 ◽

Cited By ~ 23

Author(s):

S.R Jadkar ◽

J.V Sali ◽

M.G Takwale ◽

D.V Musale ◽

S.T Kshirsagar

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Microcrystalline Silicon ◽

Phosphorus Doping ◽

Hydrogen Dilution

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Highly transparent microcrystalline silicon carbide grown with hot wire chemical vapor deposition as window layers in n-i-p microcrystalline silicon solar cells

Applied Physics Letters ◽

10.1063/1.2739335 ◽

2007 ◽

Vol 90 (20) ◽

pp. 203502 ◽

Cited By ~ 34

Author(s):

Y. Huang ◽

A. Dasgupta ◽

A. Gordijn ◽

F. Finger ◽

R. Carius

Keyword(s):

Silicon Carbide ◽

Solar Cells ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Microcrystalline Silicon

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Hot-wire chemical vapor deposition prepared aluminum doped p-type microcrystalline silicon carbide window layers for thin film silicon solar cells

Japanese Journal of Applied Physics ◽

10.7567/jjap.53.05fm04 ◽

2014 ◽

Vol 53 (5S1) ◽

pp. 05FM04 ◽

Cited By ~ 7

Author(s):

Tao Chen ◽

Florian Köhler ◽

Anna Heidt ◽

Reinhard Carius ◽

Friedhelm Finger

Keyword(s):

Thin Film ◽

Silicon Carbide ◽

Solar Cells ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Microcrystalline Silicon ◽

P Type

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Impact of microcrystalline silicon carbide growth using hot-wire chemical vapor deposition on crystalline silicon surface passivation

Thin Solid Films ◽

10.1016/j.tsf.2015.05.057 ◽

2015 ◽

Vol 595 ◽

pp. 217-220 ◽

Cited By ~ 11

Author(s):

M. Pomaska ◽

W. Beyer ◽

E. Neumann ◽

F. Finger ◽

K. Ding

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Silicon Surface ◽

Surface Passivation ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Hot Wire ◽

Microcrystalline Silicon ◽

Silicon Surface Passivation

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Characterization of Undoped, N- and P-Type Hydrogenated Nanocrystalline Silicon Carbide Films Deposited by Hot-Wire Chemical Vapor Deposition at Low Temperatures

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1415 ◽

2007 ◽

Vol 46 (4A) ◽

pp. 1415-1426 ◽

Cited By ~ 46

Author(s):

Shinsuke Miyajima ◽

Akira Yamada ◽

Makoto Konagai

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Low Temperatures ◽

Chemical Vapor ◽

Nanocrystalline Silicon ◽

Hot Wire ◽

Nanocrystalline Silicon Carbide ◽

P Type

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Pressure dependent structural and optical properties of silicon carbide thin films deposited by hot wire chemical vapor deposition from pure silane and methane gases

Journal of Materials Science Materials in Electronics ◽

10.1007/s10854-012-0934-z ◽

2012 ◽

Vol 24 (4) ◽

pp. 1361-1368 ◽

Cited By ~ 16

Author(s):

Fatemeh Shariatmadar Tehrani ◽

Boon Tong Goh ◽

Muhamad Rasat Muhamad ◽

Saadah Abdul Rahman

Keyword(s):

Thin Films ◽

Silicon Carbide ◽

Optical Properties ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Hot Wire ◽

Structural And Optical Properties

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Hydrogen structures and the optoelectronic properties in transition films from amorphous to microcrystalline silicon prepared by hot-wire chemical vapor deposition

Journal of Applied Physics ◽

10.1063/1.1555680 ◽

2003 ◽

Vol 93 (7) ◽

pp. 3776-3783 ◽

Cited By ~ 84

Author(s):

Daxing Han ◽

Keda Wang ◽

Jessica M. Owens ◽

Lynn Gedvilas ◽

Brent Nelson ◽

...

Keyword(s):

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Optoelectronic Properties ◽

Hot Wire ◽

Microcrystalline Silicon

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Structure of Microcrystalline Silicon Carbide Films Prepared by Hydrogen-Radical-Enhanced Chemical Vapor Deposition in Magnetic Field

Japanese Journal of Applied Physics ◽

10.1143/jjap.33.4395 ◽

1994 ◽

Vol 33 (Part 1, No. 7B) ◽

pp. 4395-4399 ◽

Cited By ~ 5

Author(s):

Kanji Yasui ◽

Masayoshi Muramoto ◽

Tadashi Akahane

Keyword(s):

Magnetic Field ◽

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Vapor Deposition ◽

Chemical Vapor ◽

Microcrystalline Silicon ◽

Hydrogen Radical

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Low Temperature Microcrystalline Silicon Solar Cells Prepared by Hot-Wire Chemical Vapor Deposition

2006 IEEE 4th World Conference on Photovoltaic Energy Conference ◽

10.1109/wcpec.2006.279800 ◽

2006 ◽

Cited By ~ 1

Author(s):

M.M. Adachi ◽

W.f.l. Tse ◽

K.S. Karim

Keyword(s):

Solar Cells ◽

Chemical Vapor Deposition ◽

Low Temperature ◽

Vapor Deposition ◽

Chemical Vapor ◽

Silicon Solar Cells ◽

Hot Wire ◽

Microcrystalline Silicon

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Fabrication of Microcrystalline Cubic Silicon Carbide/Crystalline Silicon Heterojunction Solar Cell by Hot Wire Chemical Vapor Deposition

Japanese Journal of Applied Physics ◽

10.1143/jjap.46.1 ◽

2007 ◽

Vol 46 (1) ◽

pp. 1-6 ◽

Cited By ~ 36

Author(s):

Chandan Banerjee ◽

Kannan Lakshmi Narayanan ◽

Keisuke Haga ◽

Jaran Sritharathikhun ◽

Shinsuke Miyajima ◽

...

Keyword(s):

Silicon Carbide ◽

Chemical Vapor Deposition ◽

Solar Cell ◽

Vapor Deposition ◽

Crystalline Silicon ◽

Chemical Vapor ◽

Heterojunction Solar Cell ◽

Hot Wire ◽

Silicon Heterojunction Solar Cell ◽

Cubic Silicon Carbide

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