scholarly journals In-situ surface and interface study of atomic oxygen modified carbon containing porous low-κ dielectric films for barrier layer applications

2016 ◽  
Vol 120 (10) ◽  
pp. 105305 ◽  
Author(s):  
J. Bogan ◽  
R. Lundy ◽  
A. P. McCoy ◽  
R. O'Connor ◽  
C. Byrne ◽  
...  
Keyword(s):  
Barrier Layer ◽  
Atomic Oxygen ◽  
Dielectric Films ◽  
Surface And Interface ◽  
Interface Study

In situ surface and interface study of crystalline (3×1)-O on InAs

2016 ◽  
Vol 109 (4) ◽  
pp. 041601 ◽  
Author(s):  
Xiaoye Qin ◽  
Wei-E. Wang ◽  
Mark S. Rodder ◽  
Robert M. Wallace
Keyword(s):  
Surface And Interface ◽  
Interface Study

Nucleation and initial growth of Pd2Si crystals on Si(111)

1993 ◽  
Vol 51 ◽  
pp. 844-845
Author(s):  
Xianghong Tong ◽  
Oliver Pohland ◽  
J. Murray Gibson
Keyword(s):  
High Vacuum ◽  
Dark Field ◽  
Ultra High Vacuum ◽  
Initial Growth ◽  
Surface And Interface ◽  
Dark Field Imaging ◽  
Transmission Electron ◽  
Initial Stage ◽  
Effect Of Surface

The nucleation and initial stage of Pd2Si crystals on Si(111) surface is studied in situ using an Ultra-High Vacuum (UHV) Transmission Electron Microscope (TEM). A modified JEOL 200CX TEM is used for the study. The Si(111) sample is prepared by chemical thinning and is cleaned inside the UHV chamber with base pressure of 1x10−9 τ. A Pd film of 20 Å thick is deposited on to the Si(111) sample in situ using a built-in mini evaporator. This room temperature deposited Pd film is thermally annealed subsequently to form Pd2Si crystals. Surface sensitive dark field imaging is used for the study to reveal the effect of surface and interface steps.The initial growth of the Pd2Si has three stages: nucleation, growth of the nuclei and coalescence of the nuclei. Our experiments shows that the nucleation of the Pd2Si crystal occurs randomly and almost instantaneously on the terraces upon thermal annealing or electron irradiation.

Surface and interface study of cermet coatings on aluminized steel by XPS

2010 ◽  
Vol 42 (6-7) ◽  
pp. 1172-1175 ◽  
Author(s):  
R. Romero ◽  
F. Martin ◽  
J. R. Ramos-Barrado ◽  
D. Leinen
Keyword(s):  
Cermet Coatings ◽  
Surface And Interface ◽  
Aluminized Steel ◽  
Interface Study

Removing the Barriers to Next Generation'S Dielectric Films: In Situ Void-Free Planarized Films

1990 ◽  
Vol 203 ◽  
Author(s):  
J.R. Monkowski ◽  
M.A. Logan ◽  
L.F. Wright
Keyword(s):  
Aspect Ratio ◽  
Ion Chromatography ◽  
Field Measurements ◽  
Dielectric Films ◽  
Breakdown Field ◽  
Scanning Electron Micrographs ◽  
Aspect Ratios ◽  
New Process ◽  
Scanning Electron

ABSTRACTIn the next generation of semiconductor devices, minimum dimensions will be smaller, aspect ratios (height to width) of devices features will be larger, and BPSG dielectrics will be challenged to deal with these changes. A new process, which integrates deposition, flow, and anneal of BPSG films, and allows void-free filling of high-aspect-ratio trenches with excellent surface planarization, is presented in this paper. Scanning electron micrographs are used to show the extent of film coverage and planarization. Additional characterization includes ion chromatography, ellipsometry, stress measurements, and breakdown field measurements.

scholarly journals Mechanisms of Barrier Layer Formation and Erosion from In Situ Observations in the Bay of Bengal

2019 ◽  
Vol 49 (5) ◽  
pp. 1183-1200 ◽  
Author(s):  
Jenson V. George ◽  
P. N. Vinayachandran ◽  
V. Vijith ◽  
V. Thushara ◽  
Anoop A. Nayak ◽  
...  
Keyword(s):  
Time Series ◽  
Barrier Layer ◽  
Bay Of Bengal ◽  
High Salinity ◽  
Layer Structure ◽  
Surface Mixed Layer ◽  
Study Region ◽  
In Situ Observations ◽  
Differential Advection

AbstractDuring the Bay of Bengal (BoB) Boundary Layer Experiment (BoBBLE) in the southern BoB, time series of microstructure measurements were obtained at 8°N, 89°E from 4 to 14 July 2016. These observations captured events of barrier layer (BL) erosion and reformation. Initially, a three-layer structure was observed: a fresh surface mixed layer (ML) of thickness 10–20 m; a BL below of 30–40-m thickness with similar temperature but higher salinity; and a high salinity core layer, associated with the Summer Monsoon Current. Each of these three layers was in relative motion to the others, leading to regions of high shear at the interfaces. However, the destabilizing influence of the shear regions was not enough to overcome the haline stratification, and the three-layer structure was preserved. A salinity budget using in situ observations suggested that during the BL erosion, differential advection brought high salinity surface waters (34.5 psu) with weak stratification to the time series location and replaced the three-layer structure with a deep ML (~60 m). The resulting weakened stratification at the time series location then allowed atmospheric wind forcing to penetrate deeper. The turbulent kinetic energy dissipation rate and eddy diffusivity showed elevated values above 10−7 W kg−1 and 10−4 m2 s−1, respectively, in the upper 60 m. Later, the surface salinity decreased again (33.8 psu) through differential horizontal advection, stratification became stronger and elevated mixing rates were confined to the upper 20 m, and the BL reformed. A 1D model experiment suggested that in the study region, differential advection of temperature–salinity characteristics is essential for the maintenance of BL and to the extent to which mixing penetrates the water column.

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