Far-infrared-light shadowgraphy for high extraction efficiency of extreme ultraviolet light from a CO2-laser-generated tin plasma

2016 ◽  
Vol 109 (5) ◽  
pp. 051104 ◽  
Author(s):  
Hiraku Matsukuma ◽  
Tatsuya Hosoda ◽  
Yosuke Suzuki ◽  
Akifumi Yogo ◽  
Tatsuya Yanagida ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Co2 Laser ◽  
Extraction Efficiency ◽  
Extreme Ultraviolet ◽  
Far Infrared ◽  
Infrared Light ◽  
Tin Plasma ◽  
Extreme Ultraviolet Light

scholarly journals Extreme ultraviolet light from a tin plasma driven by a 2-\si{\micro\meter}-wavelength laser

2020 ◽  
Author(s):  
Oscar Versolato ◽  
Lars Behnke ◽  
Ruben Schupp ◽  
Zoi Bouza ◽  
MUHARREM BAYRAKTAR ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Tin Plasma ◽  
Extreme Ultraviolet Light

scholarly journals Efficient Generation of Extreme Ultraviolet Light From Nd :YAG-Driven Microdroplet-Tin Plasma

2019 ◽  
Vol 12 (1) ◽  
Author(s):  
R. Schupp ◽  
F. Torretti ◽  
R.A. Meijer ◽  
M. Bayraktar ◽  
J. Scheers ◽  
...  
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Efficient Generation ◽  
Tin Plasma ◽  
Extreme Ultraviolet Light

Tailoring extreme-ultraviolet light

2017 ◽  
Vol 11 (4) ◽  
pp. 209-210
Author(s):  
Taro Sekikawa ◽  
Kenichi L. Ishikawa
Keyword(s):  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Extreme Ultraviolet Light

Lasing of extreme ultraviolet light with nitrogen plasma in a recombining phase—Roles of doubly excited states

2012 ◽  
Vol 19 (6) ◽  
pp. 063302 ◽  
Author(s):  
Takuya Ozawa ◽  
Shuhei Yamamura ◽  
Nao Tatsumura ◽  
Kazuhiko Horioka ◽  
Tohru Kawamura
Keyword(s):  
Excited States ◽  
Ultraviolet Light ◽  
Extreme Ultraviolet ◽  
Nitrogen Plasma ◽  
Doubly Excited States ◽  
Doubly Excited ◽  
Extreme Ultraviolet Light

Enhancing the conversion efficiency of extreme ultraviolet light sources using a 2 µm-wavelength laser

2021 ◽  
Author(s):  
Yun Yuan ◽  
Yan-Yun Ma ◽  
Wenpeng Wang ◽  
Shijia Chen ◽  
Ye Cui ◽  
...  
Keyword(s):  
Energy Conversion ◽  
Emission Spectrum ◽  
Ultraviolet Light ◽  
Conversion Efficiency ◽  
Extreme Ultraviolet ◽  
Light Sources ◽  
Band Emission ◽  
Percentage Points ◽  
Hydrodynamic Code ◽  
Extreme Ultraviolet Light

Abstract In this study, we use the FLASH radiation hydrodynamic code and the FLYCHK atomic code to investigate the energy conversion and spectra associated with laser–Sn target interactions with 1 µm and 2 µm wavelength lasers. We found that the conversion efficiency (CE) reached as much as 3.38% with the 2 µm laser, which is 1.48 percentage points higher than the 1 µm laser (CE = 1.9%). In addition, we analyzed the contribution of dominant ionization states to the emission spectrum for both lasers. We observed that the growths of the out-of-band emission eventually led to a broadening of the spectrum, resulting in a reduction of SP for the 1 µm laser. By contrast, the emission main peaks were all centered near 13.5nm for the 2 µm laser, which is beneficial for efficient emission of light with a 13.5 nm wavelength (relevant for nanolithographic applications).

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