Pulsed KrF excimer laser dopant activation in nanocrystal silicon in a silicon dioxide matrix

2016 ◽  
Vol 108 (8) ◽  
pp. 083103 ◽  
Author(s):  
Tian Zhang ◽  
Brian Simonds ◽  
Keita Nomoto ◽  
Binesh Puthen Veettil ◽  
Ziyun Lin ◽  
...  
Keyword(s):  
Silicon Dioxide ◽  
Excimer Laser ◽  
Dopant Activation ◽  
Silicon Dioxide Matrix ◽  
Krf Excimer Laser

Study on dopant activation of phosphorous implanted polycrystalline silicon thin films by KrF excimer laser annealing

2002 ◽  
Vol 46 (8) ◽  
pp. 1085-1090 ◽  
Author(s):  
Chang-Ho Tseng ◽  
Ching-Wei Lin ◽  
Teh-Hung Teng ◽  
Ting-Kuo Chang ◽  
Huang-Chung Cheng ◽  
...  
Keyword(s):  
Thin Films ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Laser Annealing ◽  
Excimer Laser Annealing ◽  
Dopant Activation ◽  
Silicon Thin Films ◽  
Krf Excimer Laser

Pressure-Controlled Wavelength Stabilization of a KrF Excimer Laser with Narrowed Bandwidth

1989 ◽  
Vol 28 (Part 1, No. 11) ◽  
pp. 2354-2356
Author(s):  
Yasuhiro Shimada ◽  
Koichi Wani ◽  
Yoshiro Ogata
Keyword(s):  
Excimer Laser ◽  
Wavelength Stabilization ◽  
Krf Excimer Laser ◽  
Pressure Controlled

Electronic structure and chemical environment of silicon nanoclusters embedded in a silicon dioxide matrix

2006 ◽  
Vol 88 (16) ◽  
pp. 163103 ◽  
Author(s):  
Anna Zimina ◽  
Stefan Eisebitt ◽  
Wolfgang Eberhardt ◽  
Johannes Heitmann ◽  
Margit Zacharias
Keyword(s):  
Electronic Structure ◽  
Silicon Dioxide ◽  
Chemical Environment ◽  
Silicon Nanoclusters ◽  
Silicon Dioxide Matrix

Preparation of boron carbide thin film by pulsed KrF excimer laser deposition process

2002 ◽  
Vol 407 (1-2) ◽  
pp. 126-131 ◽  
Author(s):  
Shin-ichi Aoqui ◽  
Hisatomo Miyata ◽  
Tamiko Ohshima ◽  
Tomoaki Ikegami ◽  
Kenji Ebihara
Keyword(s):  
Thin Film ◽  
Boron Carbide ◽  
Excimer Laser ◽  
Deposition Process ◽  
Laser Deposition ◽  
Krf Excimer Laser

An Advanced KrF Excimer Laser Stepper For Production Of 16MDRAMs

1988 ◽  
Author(s):  
Hideo Nakagawa ◽  
Masaru Sasago ◽  
Masayuki Endo ◽  
Yushihiko Hirai ◽  
Kazufumi Ogawa ◽  
...  
Keyword(s):  
Excimer Laser ◽  
Krf Excimer Laser

Single pulse vibrational Raman scattering by a broadband KrF excimer laser in a hydrogen–air flame

1990 ◽  
Vol 29 (15) ◽  
pp. 2325 ◽  
Author(s):  
Robert W. Pitz ◽  
Joseph A. Wehrmeyer ◽  
J. M. Bowling ◽  
Tsarng-Sheng Cheng
Keyword(s):  
Raman Scattering ◽  
Excimer Laser ◽  
Single Pulse ◽  
Krf Excimer Laser

Experimental study of excimer formation kinetics in a discharge-pumped KrF excimer laser

1994 ◽  
Vol 105 (1-2) ◽  
pp. 133-141 ◽  
Author(s):  
H. Yoshida ◽  
K. Nakamura ◽  
H. Ninomiya ◽  
S. Horiguchi
Keyword(s):  
Experimental Study ◽  
Excimer Laser ◽  
Formation Kinetics ◽  
Excimer Formation ◽  
Krf Excimer Laser
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