Low-temperature (∼180 °C) position-controlled lateral solid-phase crystallization of GeSn with laser-anneal seeding

2015 ◽  
Vol 107 (26) ◽  
pp. 262106 ◽  
Author(s):  
Ryo Matsumura ◽  
Hironori Chikita ◽  
Yuki Kai ◽  
Taizoh Sadoh ◽  
Hiroshi Ikenoue ◽  
...  
Keyword(s):  
Low Temperature ◽  
Solid Phase ◽  
Solid Phase Crystallization ◽  
Laser Anneal

Ultra-Low Temperature ( 180 C) Solid-Phase Crystallization of GeSn on Insulator Triggered by Laser-Anneal Seeding

2015 ◽  
Vol 69 (5) ◽  
pp. 301-304
Author(s):  
R. Matsumura ◽  
K. Moto ◽  
Y. Kai ◽  
T. Sadoh ◽  
H. Ikenoue ◽  
...  
Keyword(s):  
Low Temperature ◽  
Solid Phase ◽  
Solid Phase Crystallization ◽  
Laser Anneal

A 9.5-in. 1.3-Mpixel low-temperature poly-Si TFT-LCD fabricated by solid-phase crystallization of very thin films and an ECR-CVD gate insulator

1993 ◽  
Vol 1 (2) ◽  
pp. 203 ◽  
Author(s):  
Thomas W. Little ◽  
Hideki Koike ◽  
Ken-ichi Takahara ◽  
Takashi Nakazawa ◽  
Hiroyuki Ohshima
Keyword(s):  
Thin Films ◽  
Low Temperature ◽  
Solid Phase ◽  
Gate Insulator ◽  
Solid Phase Crystallization

WITHDRAWN: Low-temperature solid-phase crystallization of amorphous SiGe films on glass by imprint technique

2007 ◽  
Author(s):  
Kaoru Toko ◽  
Hiroshi Kanno ◽  
Atsushi Kenjo ◽  
Taizoh Sadoh ◽  
Tanemasa Asano ◽  
...  
Keyword(s):  
Low Temperature ◽  
Solid Phase ◽  
Solid Phase Crystallization

Low-temperature solid-phase-crystallization in Si1−xGex/SiO2

2000 ◽  
Vol 159-160 ◽  
pp. 116-120 ◽  
Author(s):  
S.K Park ◽  
S Yamaguchi ◽  
N Sugii ◽  
K Nakagawa ◽  
M Miyao
Keyword(s):  
Low Temperature ◽  
Solid Phase ◽  
Solid Phase Crystallization
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