Effect of Group-III precursors on unintentional gallium incorporation during epitaxial growth of InAlN layers by metalorganic chemical vapor deposition

2015 ◽  
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Author(s):  
Jeomoh Kim ◽  
Mi-Hee Ji ◽  
Theeradetch Detchprohm ◽  
Russell D. Dupuis ◽  
Alec M. Fischer ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Group Iii ◽  
Metalorganic Chemical

Hetero-Epitaxial Growth of ZnO Film by Temperature-Modulated Metalorganic Chemical Vapor Deposition

2009 ◽  
Vol 2 ◽  
pp. 045502 ◽  
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Eiji Fujimoto ◽  
Masatomo Sumiya ◽  
Tsuyoshi Ohnishi ◽  
Kenji Watanabe ◽  
Mikk Lippmaa ◽  
...  
Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Film ◽  
Metalorganic Chemical

Effect of VI/II Gas Ratio on the Epitaxial Growth of ZnO Films by Metalorganic Chemical Vapor Deposition

2011 ◽  
Vol 50 (10R) ◽  
pp. 105502 ◽  
Author(s):  
Yong-Seok Choi ◽  
Dae-Kue Hwang ◽  
Bong-Joon Kwon ◽  
Jang-Won Kang ◽  
Yong-Hoon Cho ◽  
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Keyword(s):  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Chemical Vapor ◽  
Zno Films ◽  
Gas Ratio ◽  
Metalorganic Chemical

Solid‐phase epitaxial growth of lithium tantalate thin films deposited by spray‐metalorganic chemical vapor deposition

1993 ◽  
Vol 63 (3) ◽  
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Author(s):  
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Gabriel Braunstein ◽  
Gustavo Paz‐Pujalt ◽  
Henry J. Gysling ◽  
Thomas N. Blanton
Keyword(s):  
Thin Films ◽  
Chemical Vapor Deposition ◽  
Epitaxial Growth ◽  
Vapor Deposition ◽  
Metalorganic Chemical Vapor Deposition ◽  
Solid Phase ◽  
Chemical Vapor ◽  
Lithium Tantalate ◽  
Metalorganic Chemical
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