AlGaN/GaN diaphragm-based pressure sensor with direct high performance piezoelectric transduction mechanism

2015 ◽  
Vol 107 (12) ◽  
pp. 122102 ◽  
Author(s):  
J. Dzuba ◽  
G. Vanko ◽  
M. Držík ◽  
I. Rýger ◽  
V. Kutiš ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Transduction Mechanism ◽  
Piezoelectric Transduction

scholarly journals High-Performance Resistive Pressure Sensor Based on Elastic Composite Hydrogel of Silver Nanowires and Poly(ethylene glycol)

Micromachines ◽  
2018 ◽  
Vol 9 (9) ◽  
pp. 438 ◽  
Author(s):  
Youngsang Ko ◽  
Dabum Kim ◽  
Goomin Kwon ◽  
Jungmok You
Keyword(s):  
Composite Material ◽  
Ethylene Glycol ◽  
Pressure Sensor ◽  
High Performance ◽  
Silver Nanowires ◽  
High Sensitivity ◽  
Composite Hydrogel ◽  
Poly Ethylene Glycol ◽  
Pressure Sensing ◽  
Poly Ethylene

Improved pressure sensing is of great interest to enable the next-generation of bioelectronics systems. This paper describes the development of a transparent, flexible, highly sensitive pressure sensor, having a composite sandwich structure of elastic silver nanowires (AgNWs) and poly(ethylene glycol) (PEG). A simple PEG photolithography was employed to construct elastic AgNW-PEG composite patterns on flexible polyethylene terephthalate (PET) film. A porous PEG hydrogel structure enabled the use of conductive AgNW patterns while maintaining the elasticity of the composite material, features that are both essential for high-performance pressure sensing. The transparency and electrical properties of AgNW-PEG composite could be precisely controlled by varying the AgNW concentration. An elastic AgNW-PEG composite hydrogel with 0.6 wt % AgNW concentration exhibited high transmittance including T550nm of around 86%, low sheet resistance of 22.69 Ω·sq−1, and excellent bending durability (only 5.8% resistance increase under bending to 10 mm radius). A flexible resistive pressure sensor based on our highly transparent AgNW-PEG composite showed stable and reproducible response, high sensitivity (69.7 kPa−1), low sensing threshold (~2 kPa), and fast response time (20–40 ms), demonstrating the effectiveness of the AgNW-PEG composite material as an elastic conductor.

scholarly journals Nano Carbon Black-Based High Performance Wearable Pressure Sensors

Nanomaterials ◽  
2020 ◽  
Vol 10 (4) ◽  
pp. 664 ◽  
Author(s):  
Junsong Hu ◽  
Junsheng Yu ◽  
Ying Li ◽  
Xiaoqing Liao ◽  
Xingwu Yan ◽  
...  
Keyword(s):  
Carbon Black ◽  
Pressure Sensor ◽  
High Performance ◽  
Large Scale ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Wearable Electronics ◽  
Atmospheric Pollutant ◽  
Piezoresistive Pressure Sensor ◽  
Nano Carbon

The reasonable design pattern of flexible pressure sensors with excellent performance and prominent features including high sensitivity and a relatively wide workable linear range has attracted significant attention owing to their potential application in the advanced wearable electronics and artificial intelligence fields. Herein, nano carbon black from kerosene soot, an atmospheric pollutant generated during the insufficient burning of hydrocarbon fuels, was utilized as the conductive material with a bottom interdigitated textile electrode screen printed using silver paste to construct a piezoresistive pressure sensor with prominent performance. Owing to the distinct loose porous structure, the lumpy surface roughness of the fabric electrodes, and the softness of polydimethylsiloxane, the piezoresistive pressure sensor exhibited superior detection performance, including high sensitivity (31.63 kPa−1 within the range of 0–2 kPa), a relatively large feasible range (0–15 kPa), a low detection limit (2.26 pa), and a rapid response time (15 ms). Thus, these sensors act as outstanding candidates for detecting the human physiological signal and large-scale limb movement, showing their broad range of application prospects in the advanced wearable electronics field.

High-Performance MEMS Pressure Sensor Fully-Integrated with a 3-Axis Accelerometer

2019 ◽  
Author(s):  
Frederic Souchon ◽  
Loic Joet ◽  
Carine Ladner ◽  
Patrice Rey ◽  
Stephan Louwers
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Fully Integrated

A flexible pressure sensor based on an MXene–textile network structure

2019 ◽  
Vol 7 (4) ◽  
pp. 1022-1027 ◽  
Author(s):  
Tongkuai Li ◽  
Longlong Chen ◽  
Xiang Yang ◽  
Xin Chen ◽  
Zhihan Zhang ◽  
...  
Keyword(s):  
Network Structure ◽  
Pressure Sensor ◽  
High Performance ◽  
Pressure Sensors ◽  
Wearable Electronics ◽  
Physiological Signal ◽  
Signal Perception ◽  
Performance Pressure ◽  
Human Machine Interfaces ◽  
Flexible Pressure Sensor

High-performance pressure sensors have attracted considerable attention recently due to their promising applications in touch displays, wearable electronics, human–machine interfaces, and real-time physiological signal perception.

scholarly journals Temperature Characteristics of a Pressure Sensor Based on BN/Graphene/BN Heterostructure

Sensors ◽  
2019 ◽  
Vol 19 (10) ◽  
pp. 2223 ◽  
Author(s):  
Mengwei Li ◽  
Teng Zhang ◽  
Pengcheng Wang ◽  
Minghao Li ◽  
Junqiang Wang ◽  
...  
Keyword(s):  
Temperature Coefficient ◽  
Pressure Sensor ◽  
High Performance ◽  
Pressure Sensors ◽  
Resistance Change ◽  
Change Rate ◽  
Influence Of Temperature ◽  
Temperature Characteristics ◽  
Device Resistance ◽  
Influence Of Temperature On

Temperature is a significant factor in the application of graphene-based pressure sensors. The influence of temperature on graphene pressure sensors is twofold: an increase in temperature causes the substrates of graphene pressure sensors to thermally expand, and thus, the graphene membrane is stretched, leading to an increase in the device resistance; an increase in temperature also causes a change in the graphene electrophonon coupling, resulting in a decrease in device resistance. To investigate which effect dominates the influence of temperature on the pressure sensor based on the graphene–boron nitride (BN) heterostructure proposed in our previous work, the temperature characteristics of two BN/graphene/BN heterostructures with and without a microcavity beneath them were analyzed in the temperature range 30–150 °C. Experimental results showed that the resistance of the BN/graphene/BN heterostructure with a microcavity increased with the increase in temperature, and the temperature coefficient was up to 0.25%°C−1, indicating the considerable influence of thermal expansion in such devices. In contrast, with an increase in temperature, the resistance of the BN/graphene/BN heterostructure without a microcavity decreased with a temperature coefficient of −0.16%°C−1. The linearity of the resistance change rate (ΔR/R)–temperature curve of the BN/graphene/BN heterostructure without a microcavity was better than that of the BN/graphene/BN heterostructure with a microcavity. These results indicate that the influence of temperature on the pressure sensors based on BN/graphene/BN heterostructures should be considered, especially for devices with pressure microcavities. BN/graphene/BN heterostructures without microcavities can be used as high-performance temperature sensors.

scholarly journals Flexible and Highly Sensitive Pressure Sensors Based on Microstructured Carbon Nanowalls Electrodes

Nanomaterials ◽  
2019 ◽  
Vol 9 (4) ◽  
pp. 496 ◽  
Author(s):  
Xi Zhou ◽  
Yongna Zhang ◽  
Jun Yang ◽  
Jialu Li ◽  
Shi Luo ◽  
...  
Keyword(s):  
Pressure Sensor ◽  
High Performance ◽  
Limit Of Detection ◽  
Pressure Sensors ◽  
High Sensitivity ◽  
Physiological Signals ◽  
Healthcare Applications ◽  
Highly Sensitive ◽  
Carbon Nanowalls ◽  
Pressure Regime

Wearable pressure sensors have attracted widespread attention in recent years because of their great potential in human healthcare applications such as physiological signals monitoring. A desirable pressure sensor should possess the advantages of high sensitivity, a simple manufacturing process, and good stability. Here, we present a highly sensitive, simply fabricated wearable resistive pressure sensor based on three-dimensional microstructured carbon nanowalls (CNWs) embedded in a polydimethylsiloxane (PDMS) substrate. The method of using unpolished silicon wafers as templates provides an easy approach to fabricate the irregular microstructure of CNWs/PDMS electrodes, which plays a significant role in increasing the sensitivity and stability of resistive pressure sensors. The sensitivity of the CNWs/PDMS pressure sensor with irregular microstructures is as high as 6.64 kPa−1 in the low-pressure regime, and remains fairly high (0.15 kPa−1) in the high-pressure regime (~10 kPa). Both the relatively short response time of ~30 ms and good reproducibility over 1000 cycles of pressure loading and unloading tests illustrate the high performance of the proposed device. Our pressure sensor exhibits a superior minimal limit of detection of 0.6 Pa, which shows promising potential in detecting human physiological signals such as heart rate. Moreover, it can be turned into an 8 × 8 pixels array to map spatial pressure distribution and realize array sensing imaging.

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