On the pressure effect in energetic deposition of Cu thin films by modulated pulsed power magnetron sputtering: A global plasma model and experiments

2015 ◽  
Vol 117 (20) ◽  
pp. 203302 ◽  
Author(s):  
B. C. Zheng ◽  
D. Meng ◽  
H. L. Che ◽  
M. K. Lei
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Pressure Effect ◽  
Pulsed Power ◽  
Plasma Model

A global plasma model for reactive deposition of compound films by modulated pulsed power magnetron sputtering discharges

2017 ◽  
Vol 121 (17) ◽  
pp. 171901 ◽  
Author(s):  
B. C. Zheng ◽  
Z. L. Wu ◽  
B. Wu ◽  
Y. G. Li ◽  
M. K. Lei
Keyword(s):  
Magnetron Sputtering ◽  
Pulsed Power ◽  
Plasma Model ◽  
Reactive Deposition

PRODUCTION OF ALN THIN FILMS VIA DEEP OSCILLATION MAGNETRON SPUTTERING FOR BIOSENSORS

2017 ◽  
Author(s):  
OLIMPIA SALAS ◽  
Jianliang Lin ◽  
LIZBETH MELO-MAXIMO ◽  
Abril Erendira Murillo Sanchez ◽  
DULCE VIRIDIANA MELO MAXIMO ◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering

Single Crystal, High Band Gap CdS Thin Films Grown by RF Magnetron Sputtering in Argon Atmosphere for Solar Cell Applications

2018 ◽  
Vol 10 (3) ◽  
pp. 03005-1-03005-6 ◽  
Author(s):  
Rupali Kulkarni ◽  
◽  
Amit Pawbake ◽  
Ravindra Waykar ◽  
Ashok Jadhawar ◽  
...  
Keyword(s):  
Thin Films ◽  
Solar Cell ◽  
Magnetron Sputtering ◽  
Single Crystal ◽  
Band Gap ◽  
Rf Magnetron Sputtering ◽  
Argon Atmosphere ◽  
Cds Thin Films ◽  
High Band

CONTROLLED SYNTHESIS OF THIN FILMS OBTAINED BY MAGNETRON SPUTTERING TECHNIQUE

2018 ◽  
Author(s):  
K. E. Utkin ◽  
◽  
S. I. Torgashin ◽  
A. V. Khoshev ◽  
◽  
...  
Keyword(s):  
Thin Films ◽  
Magnetron Sputtering ◽  
Controlled Synthesis
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