Collisionless “thermalization” in the sheath of an argon discharge

2015 ◽  
Vol 22 (4) ◽  
pp. 043505 ◽  
Author(s):  
David Coulette ◽  
Giovanni Manfredi
Keyword(s):  
Argon Discharge

Spatial structure of a nonlinear wave of stratification

1998 ◽  
Vol 60 (2) ◽  
pp. 215-228 ◽  
Author(s):  
M. ROTTMANN ◽  
K. H. SPATSCHEK
Keyword(s):  
Nonlinear Wave ◽  
Model Equation ◽  
Positive Column ◽  
Landau Equation ◽  
Reductive Perturbation Method ◽  
Ginzburg Landau ◽  
Subcritical Regime ◽  
Ginzburg Landau Equation ◽  
Argon Discharge ◽  
Radial Structure

The positive column of a gas discharge is investigated in the subcritical regime when no self-excited nonlinear ionization wave exists. We derive a model equation for the so-called wave of stratification, which is an externally excited envelope wave. The main point of this work is that, in contrast to previous papers, we take into account the radial structure of the homogeneous column. The mathematical description of the wave of stratification in the form of a complex Ginzburg–Landau equation follows by a systematic reductive perturbation method. The coefficients in the Ginzburg–Landau equation are first calculated in general and are then evaluated explicitly for a low-pressure argon discharge. The results are compared with those obtained from a frequently used simpler model that neglects any radial structure. Finally, the dynamics of the nonlinear wave of stratification is demonstrated via numerical simulations.

scholarly journals Study on the formation of square emission pattern in argon discharge

2006 ◽  
Vol 55 (10) ◽  
pp. 5375
Author(s):  
Dong Li-Fang ◽  
Fan Wei-Li ◽  
Li Xue-Chen ◽  
Gao Rui-Ling ◽  
Liu Fu-Cheng ◽  
...  
Keyword(s):  
Emission Pattern ◽  
Argon Discharge

Radially-dependent ignition process of a pulsed capacitively coupled RF argon plasma over 300 mm-diameter electrodes: multi-fold experimental diagnostics

2021 ◽  
Author(s):  
Zi-Xuan Su ◽  
De-Hua Shi ◽  
Yong-Xin Liu ◽  
Kai Zhao ◽  
Fei Gao ◽  
...  
Keyword(s):  
Time Evolution ◽  
Power Density ◽  
Current Density ◽  
Radial Dependence ◽  
Total Power ◽  
Ignition Process ◽  
Azimuthal Magnetic Field ◽  
Capacitively Coupled ◽  
Argon Discharge ◽  
Experimental Diagnostics

Abstract Temporal evolution of electrical and plasma parameters over 300 mm-diameter electrodes during the pre-ignition, ignition, and post-ignition phases of a pulsed capacitively coupled radio-frequency (RF) argon discharge is investigated by multi-fold experimental diagnostics. The electron density, n e, and the optical emission intensity (OEI) at different radial positions are measured time-resolved by using a hairpin probe and an optical probe, respectively. A B-dot probe is employed to determine the waveforms of the azimuthal magnetic field at different radii, from which the waveforms of the axial current density at corresponding radial positions are derived based on Ampere’s law. Then, the time evolution of the power density at various radii can be calculated, provided that the voltage drop across the electrodes is independent of radius. Meanwhile, the time-dependent total power deposited into the reactor is calculated with the voltage and the current waveforms measured by a voltage and a current probe at the power feeding point. It was found that during pre-ignition phase, the OEI and n e cannot be measurable due to extremely low power deposition when the system exhibits pure capacitive impedance. During the ignition phase, the OEI, the power density, and the current density exhibit the most significant increase at the electrode center, while time evolution of n e seems to exhibit a relatively weak radial dependence. In particular, at small radii, i.e. r ≤ 8 cm, the OEI was observed to change with time in the same manner as the power density during the ignition phase, because the RF power is absorbed primarily by electrons, which dissipate their energy via inelastic collisions. The more drastic ignition at the center is possibly associated with a center-high profile of Ar metastable density at the beginning of each pulse. Shortly, the profile of n e becomes edge-high during the post-ignition phase and remains thereafter until the end of the pulse-on periods. Methodologically, the synergistic diagnostics lay the foundation for extensive studies on spatiotemporal evolution of plasma ignition process under broader conditions, e.g. low gas pressure and very high frequency, widely used by practical etching process.

Temporal evolution of a capacitively coupled argon discharge due to the sputtering of an oxide layer on an aluminum electrode

2019 ◽  
Vol 28 (6) ◽  
pp. 065011
Author(s):  
Jie Qiu ◽  
Jiang-Tao Li ◽  
Wen-Cong Chen ◽  
Zhen-Bin Wang ◽  
Fei-Xiang Liu ◽  
...  
Keyword(s):  
Oxide Layer ◽  
Temporal Evolution ◽  
Aluminum Electrode ◽  
Capacitively Coupled ◽  
Argon Discharge

The influence of Hg(63P2) population on emission processes in a low‐pressure mercury‐argon discharge

1990 ◽  
Vol 68 (6) ◽  
pp. 2661-2666 ◽  
Author(s):  
L. Maleki ◽  
B. J. Blasenheim ◽  
G. R. Janik
Keyword(s):  
Low Pressure ◽  
Argon Discharge
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