scholarly journals Combination of grazing incidence x-ray fluorescence with x-ray reflectivity in one table-top spectrometer for improved characterization of thin layer and implants on/in silicon wafers

2014 ◽  
Vol 85 (8) ◽  
pp. 083110 ◽  
Author(s):  
D. Ingerle ◽  
M. Schiebl ◽  
C. Streli ◽  
P. Wobrauschek
Keyword(s):  
Thin Layer ◽  
Grazing Incidence ◽  
Silicon Wafers ◽  
X Ray

Reference-free, depth-dependent characterization of nanolayers and gradient systems with advanced grazing incidence X-ray fluorescence analysis

2015 ◽  
Vol 212 (3) ◽  
pp. 523-528 ◽  
Author(s):  
Philipp Hönicke ◽  
Blanka Detlefs ◽  
Matthias Müller ◽  
Erik Darlatt ◽  
Emmanuel Nolot ◽  
...  
Keyword(s):  
Fluorescence Analysis ◽  
Grazing Incidence ◽  
X Ray ◽  
Gradient Systems

The influence of X-ray coherence length on TXRF and XSW and the characterization of nanoparticles observed under grazing incidence of X-rays

2009 ◽  
Vol 24 (6) ◽  
pp. 792 ◽  
Author(s):  
Alex von Bohlen ◽  
Markus Krämer ◽  
Christian Sternemann ◽  
Michael Paulus
Keyword(s):  
Coherence Length ◽  
Grazing Incidence ◽  
X Rays ◽  
X Ray

Characterization of porous silicon layers by grazing- incidence X-ray fluorescence and diffraction

1991 ◽  
Vol 79 (11) ◽  
pp. 923-928 ◽  
Author(s):  
A. Bensaid ◽  
G. Patrat ◽  
M. Brunel ◽  
F. de Bergevin ◽  
R. Hérino
Keyword(s):  
Porous Silicon ◽  
Grazing Incidence ◽  
X Ray

Applications of x-ray Fluorescence Analysis to the Thin Layer on Silicon Wafers

2008 ◽  
pp. 615-615-13
Author(s):  
T Shiraiwa ◽  
T Ochiai ◽  
M Sano ◽  
Y Tada ◽  
T Arai
Keyword(s):  
Thin Layer ◽  
Fluorescence Analysis ◽  
Silicon Wafers ◽  
X Ray
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