scholarly journals Chemical solution deposition of ferroelectric yttrium-doped hafnium oxide films on platinum electrodes

2014 ◽  
Vol 104 (20) ◽  
pp. 202903 ◽  
Author(s):  
S. Starschich ◽  
D. Griesche ◽  
T. Schneller ◽  
R. Waser ◽  
U. Böttger
Keyword(s):  
Chemical Solution Deposition ◽  
Hafnium Oxide ◽  
Oxide Films ◽  
Platinum Electrodes ◽  
Chemical Solution ◽  
Solution Deposition

Transparent conducting oxide films of group V doped titania prepared by aqueous chemical solution deposition

2014 ◽  
Vol 555 ◽  
pp. 33-38 ◽  
Author(s):  
Ken Elen ◽  
Boris Capon ◽  
Christopher De Dobbelaere ◽  
Daan Dewulf ◽  
Nick Peys ◽  
...  
Keyword(s):  
Chemical Solution Deposition ◽  
Transparent Conducting Oxide ◽  
Oxide Films ◽  
Chemical Solution ◽  
Group V ◽  
Solution Deposition ◽  
Transparent Conducting ◽  
Doped Titania

Chemical Solution Deposition of Ferroelectric Hafnium Oxide for Future Lead Free Ferroelectric Devices

2015 ◽  
Vol 4 (12) ◽  
pp. P419-P423 ◽  
Author(s):  
Sergej Starschich ◽  
David Griesche ◽  
Theodor Schneller ◽  
Ulrich Böttger
Keyword(s):  
Chemical Solution Deposition ◽  
Hafnium Oxide ◽  
Lead Free ◽  
Chemical Solution ◽  
Solution Deposition

An extensive study of the influence of dopants on the ferroelectric properties of HfO2

2017 ◽  
Vol 5 (2) ◽  
pp. 333-338 ◽  
Author(s):  
S. Starschich ◽  
U. Boettger
Keyword(s):  
Thin Films ◽  
Chemical Solution Deposition ◽  
Hafnium Oxide ◽  
Ferroelectric Properties ◽  
Extensive Study ◽  
Chemical Solution ◽  
Solution Deposition

The ferroelectric properties of hafnium oxide based thin films prepared by chemical solution deposition (CSD) are investigated.

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