Accurate argon cluster-ion sputter yields: Measured yields and effect of the sputter threshold in practical depth-profiling by x-ray photoelectron spectroscopy and secondary ion mass spectrometry

Peter J. Cumpson; Jose F. Portoles; Anders J. Barlow; Naoko Sano

doi:10.1063/1.4823815

Accurate argon cluster-ion sputter yields: Measured yields and effect of the sputter threshold in practical depth-profiling by x-ray photoelectron spectroscopy and secondary ion mass spectrometry

Journal of Applied Physics ◽

10.1063/1.4823815 ◽

2013 ◽

Vol 114 (12) ◽

pp. 124313 ◽

Cited By ~ 30

Author(s):

Peter J. Cumpson ◽

Jose F. Portoles ◽

Anders J. Barlow ◽

Naoko Sano

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Depth Profiling ◽

X Ray ◽

Ion Mass Spectrometry ◽

Cluster Ion ◽

Secondary Ion

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Time‐of‐flight secondary ion mass spectrometry and X‐ray photoelectron spectroscopy study of 2‐phenylimidazole on brass

Rapid Communications in Mass Spectrometry ◽

10.1002/rcm.8974 ◽

2020 ◽

Vol 35 (2) ◽

Author(s):

Matjaž Finšgar

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Spectroscopy Study ◽

X Ray ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Are cluster ion analysis beams good choices for hydrogen depth profiling using time-of-flight secondary ion mass spectrometry?

Surface and Interface Analysis ◽

10.1002/sia.3776 ◽

2011 ◽

Vol 44 (1) ◽

pp. 89-93 ◽

Cited By ~ 10

Author(s):

Zihua Zhu ◽

Vaithiyalingam Shutthanandan

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

Depth Profiling ◽

Ion Mass Spectrometry ◽

Cluster Ion ◽

Secondary Ion ◽

Ion Analysis

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Practical Applications of Argon Gas Cluster Ion Beam for X-ray Photoelectron Spectroscopy and Time-of-flight Secondary Ion Mass Spectrometry

Journal of the Vacuum Society of Japan ◽

10.3131/jvsj2.56.348 ◽

2013 ◽

Vol 56 (9) ◽

pp. 348-354 ◽

Cited By ~ 2

Author(s):

Takuya MIYAYAMA

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Ion Beam ◽

Argon Gas ◽

X Ray ◽

Practical Applications ◽

Cluster Ion ◽

Gas Cluster Ion Beam ◽

Secondary Ion

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Probing albumin adsorption onto calcium phosphates by x-ray photoelectron spectroscopy and time-of-flight secondary ion mass spectrometry

Journal of Vacuum Science & Technology B Nanotechnology and Microelectronics Materials Processing Measurement and Phenomena ◽

10.1116/1.3613919 ◽

2011 ◽

Vol 29 (4) ◽

pp. 04D113 ◽

Cited By ~ 14

Author(s):

J. E. Baio ◽

T. Weidner ◽

G. Interlandi ◽

C. Mendoza-Barrera ◽

H. E. Canavan ◽

...

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Calcium Phosphates ◽

Time Of Flight ◽

X Ray ◽

Ion Mass Spectrometry ◽

Albumin Adsorption ◽

Secondary Ion

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Combined instrument for the on‐line investigation of plasma deposited or etched surfaces by monochromatized x‐ray photoelectron spectroscopy and time‐of‐flight secondary ion mass spectrometry

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films ◽

10.1116/1.578851 ◽

1994 ◽

Vol 12 (3) ◽

pp. 671-676 ◽

Cited By ~ 4

Author(s):

P. W. Jahn ◽

F. M. Petrat ◽

D. Wolany ◽

M. Deimel ◽

T. Gantenfort ◽

...

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Time Of Flight ◽

X Ray ◽

Ion Mass Spectrometry ◽

On Line ◽

Secondary Ion

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A Combined Investigation into the Effect of Ni/Mn/Co Ions on Lithium-Ion Battery Anodes Using X-Ray Photoelectron Spectroscopy and Secondary Ion Mass Spectrometry

ECS Meeting Abstracts ◽

10.1149/ma2014-01/2/245 ◽

2014 ◽

Keyword(s):

Mass Spectrometry ◽

Lithium Ion Battery ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

Lithium Ion ◽

X Ray ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Interaction of nitrogen and ammonia plasmas with polystyrene and polycarbonate studied by X-ray photoelectron spectroscopy, neutron activation analysis and static secondary ion mass spectrometry

Polymer ◽

10.1016/0032-3861(89)90380-7 ◽

1989 ◽

Vol 30 (1) ◽

pp. 40-44 ◽

Cited By ~ 133

Author(s):

J. Lub ◽

F.C.B.M. van Vroonhoven ◽

E. Bruninx ◽

A. Benninghoven

Keyword(s):

Mass Spectrometry ◽

Neutron Activation Analysis ◽

Activation Analysis ◽

Neutron Activation ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

X Ray ◽

Ion Mass Spectrometry ◽

Secondary Ion

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97/05172 Identification of inorganic nitrogen in an Australian bituminous coal using X-ray photoelectron spectroscopy (XPS) and time-of-flight secondary ion mass spectrometry (TOFSIMS)

Fuel and Energy Abstracts ◽

10.1016/s0140-6701(97)82445-9 ◽

1997 ◽

Vol 38 (6) ◽

pp. 448-449

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Bituminous Coal ◽

Secondary Ion Mass Spectrometry ◽

Inorganic Nitrogen ◽

Time Of Flight ◽

X Ray ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Static Secondary Ion Mass Spectrometry and X-Ray Photoelectron Spectroscopy of Deuterium- and Methyl-Substituted Polystyrene

Applied Spectroscopy ◽

10.1366/0003702914337588 ◽

1991 ◽

Vol 45 (2) ◽

pp. 209-217 ◽

Cited By ~ 32

Author(s):

Ashutosh Chilkoti ◽

David G. Castner ◽

Buddy D. Ratner

Keyword(s):

Mass Spectrometry ◽

Photoelectron Spectroscopy ◽

Secondary Ion Mass Spectrometry ◽

X Ray ◽

Ion Mass Spectrometry ◽

Secondary Ion

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Nondestructive dose determination and depth profiling of arsenic ultrashallow junctions with total reflection X-ray fluorescence analysis compared to dynamic secondary ion mass spectrometry

Spectrochimica Acta Part B Atomic Spectroscopy ◽

10.1016/j.sab.2004.04.014 ◽

2004 ◽

Vol 59 (8) ◽

pp. 1243-1249 ◽

Cited By ~ 23

Author(s):

G. Pepponi ◽

C. Streli ◽

P. Wobrauschek ◽

N. Zoeger ◽

K. Luening ◽

...

Keyword(s):

Mass Spectrometry ◽

Secondary Ion Mass Spectrometry ◽

Depth Profiling ◽

Fluorescence Analysis ◽

Total Reflection ◽

X Ray ◽

Dose Determination ◽

Ultrashallow Junctions ◽

Ion Mass Spectrometry ◽

Secondary Ion

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