Effects of crystallization mechanism on the electrical characteristics of green continuous-wave-laser-crystallized polycrystalline silicon thin film transistors

Chia-Hsin Chou; I-Che Lee; Po-Yu Yang; Ming-Jhe Hu; Chao-Lung Wang; Chun-Yu Wu; Yun-Shan Chien; Kuang-Yu Wang; Huang-Chung Cheng

doi:10.1063/1.4812669

Effects of crystallization mechanism on the electrical characteristics of green continuous-wave-laser-crystallized polycrystalline silicon thin film transistors

Applied Physics Letters ◽

10.1063/1.4812669 ◽

2013 ◽

Vol 103 (5) ◽

pp. 053515 ◽

Cited By ~ 24

Author(s):

Chia-Hsin Chou ◽

I-Che Lee ◽

Po-Yu Yang ◽

Ming-Jhe Hu ◽

Chao-Lung Wang ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Crystallization Mechanism ◽

Electrical Characteristics ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser

Download Full-text

High-Performance Polycrystalline Silicon Thin Film Transistors on Non-Alkali Glass Produced Using Continuous Wave Laser Lateral Crystallization

Japanese Journal of Applied Physics ◽

10.1143/jjap.41.l311 ◽

2002 ◽

Vol 41 (Part 2, No. 3B) ◽

pp. L311-L313 ◽

Cited By ~ 86

Author(s):

Akito Hara ◽

Fumiyo Takeuchi ◽

Michiko Takei ◽

Katsuyuki Suga ◽

Kenichi Yoshino ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Alkali Glass ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

(Invited) Self-Aligned Four-Terminal Low-Temperature Polycrystalline-Silicon Thin-Film Transistors on Glass Substrate Using Continuous-Wave Laser Lateral Crystallization

ECS Transactions ◽

10.1149/07510.0037ecst ◽

2016 ◽

Vol 75 (10) ◽

pp. 37-47 ◽

Cited By ~ 1

Author(s):

A. Hara ◽

H. Ohsawa

Keyword(s):

Thin Film ◽

Low Temperature ◽

Glass Substrate ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

Tri-Gate Polycrystalline Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization with Improved Electron Transport Properties

Japanese Journal of Applied Physics ◽

10.7567/jjap.51.02bj03 ◽

2012 ◽

Vol 51 (2S) ◽

pp. 02BJ03 ◽

Cited By ~ 9

Author(s):

Shuntaro Fujii ◽

Shin-Ichiro Kuroki ◽

Yuya Kawasaki ◽

Koji Kotani

Keyword(s):

Thin Film ◽

Electron Transport ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Electron Transport Properties ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

High Performance Low Temperature Polycrystalline Silicon Thin Film Transistors on Non-alkaline Glass Produced Using Diode Pumped Solid State Continuous Wave Laser Lateral Crystallization

Japanese Journal of Applied Physics ◽

10.1143/jjap.43.1269 ◽

2004 ◽

Vol 43 (4A) ◽

pp. 1269-1276 ◽

Cited By ~ 97

Author(s):

Akito Hara ◽

Michiko Takei ◽

Fumiyo Takeuchi ◽

Katsuyuki Suga ◽

Kenichi Yoshino ◽

...

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Diode Pumped ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

Low-Temperature-Processed Polycrystalline Silicon Thin-Film Transistors with Stable Solid-State Continuous-Wave Laser Crystallization

Japanese Journal of Applied Physics ◽

10.1143/jjap.45.l973 ◽

2006 ◽

Vol 45 (No. 36) ◽

pp. L973-L976 ◽

Cited By ~ 3

Author(s):

Ching-Lin Fan ◽

Tsung-Hsien Yang ◽

Cheng-I Lin

Keyword(s):

Thin Film ◽

Solid State ◽

Low Temperature ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Wave Laser

Download Full-text

Effects of a capping oxide layer on polycrystalline-silicon thin-film transistors fabricated by continuous-wave laser crystallization

Japanese Journal of Applied Physics ◽

10.7567/jjap.57.06kb06 ◽

2018 ◽

Vol 57 (6S3) ◽

pp. 06KB06

Author(s):

Yi-Shao Li ◽

Chun-Yi Wu ◽

Chia-Hsin Chou ◽

Chan-Yu Liao ◽

Kai-Chi Chuang ◽

...

Keyword(s):

Thin Film ◽

Oxide Layer ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Laser Crystallization ◽

Silicon Thin Film ◽

Wave Laser

Download Full-text

Low-Temperature Polycrystalline-Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization and Metal/Hafnium Oxide Gate Stack on Nonalkaline Glass Substrate

IEICE Transactions on Electronics ◽

10.1587/transele.e100.c.94 ◽

2017 ◽

Vol E100.C (1) ◽

pp. 94-100 ◽

Cited By ~ 1

Author(s):

Tatsuya MEGURO ◽

Akito HARA

Keyword(s):

Thin Film ◽

Low Temperature ◽

Thin Film Transistors ◽

Hafnium Oxide ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

Tri-Gate Polycrystalline Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization with Improved Electron Transport Properties

Japanese Journal of Applied Physics ◽

10.1143/jjap.51.02bj03 ◽

2012 ◽

Vol 51 (2) ◽

pp. 02BJ03 ◽

Cited By ~ 1

Author(s):

Shuntaro Fujii ◽

Shin-Ichiro Kuroki ◽

Yuya Kawasaki ◽

Koji Kotani

Keyword(s):

Thin Film ◽

Electron Transport ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Electron Transport Properties ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

(Invited) High-Performance Top-Gate and Double-Gate Low-Temperature Polycrystalline-Silicon Thin-Film Transistors Fabricated Using Continuous-Wave-Laser Lateral Crystallization on a Glass Substrate

ECS Transactions ◽

10.1149/06701.0079ecst ◽

2015 ◽

Vol 67 (1) ◽

pp. 79-89 ◽

Cited By ~ 1

Author(s):

A. Hara ◽

T. Meguro ◽

S. Sasaki ◽

H. Ohsawa

Keyword(s):

Thin Film ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

High Performance ◽

Continuous Wave ◽

Double Gate ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text

Strain-Induced Back Channel Electron Mobility Enhancement in Polycrystalline Silicon Thin-Film Transistors Fabricated by Continuous-Wave Laser Lateral Crystallization

Japanese Journal of Applied Physics ◽

10.1143/jjap.50.04dh10 ◽

2011 ◽

Vol 50 (4) ◽

pp. 04DH10 ◽

Cited By ~ 4

Author(s):

Shuntaro Fujii ◽

Shin-Ichiro Kuroki ◽

Koji Kotani ◽

Takashi Ito

Keyword(s):

Thin Film ◽

Electron Mobility ◽

Thin Film Transistors ◽

Polycrystalline Silicon ◽

Continuous Wave ◽

Continuous Wave Laser ◽

Silicon Thin Film ◽

Wave Laser ◽

Lateral Crystallization

Download Full-text