Characteristics of high-purity Cu thin films deposited on polyimide by radio-frequency Ar/H2 atmospheric-pressure plasma jet

P. Zhao; W. Zheng; Y. D. Meng; M. Nagatsu

doi:10.1063/1.4795808

Characteristics of high-purity Cu thin films deposited on polyimide by radio-frequency Ar/H2 atmospheric-pressure plasma jet

Journal of Applied Physics ◽

10.1063/1.4795808 ◽

2013 ◽

Vol 113 (12) ◽

pp. 123301 ◽

Cited By ~ 29

Author(s):

P. Zhao ◽

W. Zheng ◽

Y. D. Meng ◽

M. Nagatsu

Keyword(s):

Thin Films ◽

Radio Frequency ◽

High Purity ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Pressure Plasma

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Effects of O 2 gases addition on enhanced lithium ion intercalation and conduction of flexible-transparent-lithiated tantalum oxide thin films synthesized by an atmospheric pressure plasma jet

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2016.03.035 ◽

2016 ◽

Vol 303 ◽

pp. 215-225 ◽

Cited By ~ 2

Author(s):

Yung-Sen Lin ◽

Ping-Ju Sung ◽

Ming-Ho Hsieh

Keyword(s):

Thin Films ◽

Atmospheric Pressure ◽

Tantalum Oxide ◽

Atmospheric Pressure Plasma ◽

Lithium Ion ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Oxide Thin Films ◽

Pressure Plasma ◽

Ion Intercalation

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Trajectory effect on the properties of large area ZnO thin films deposited by atmospheric pressure plasma jet

Applied Surface Science ◽

10.1016/j.apsusc.2014.05.220 ◽

2014 ◽

Vol 314 ◽

pp. 1074-1081 ◽

Cited By ~ 9

Author(s):

Jia-Yang Juang ◽

Tung-Sheng Chou ◽

Hsin-Tien Lin ◽

Yuan-Fang Chou ◽

Chih-Chiang Weng

Keyword(s):

Thin Films ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Zno Thin Films ◽

Atmospheric Pressure Plasma Jet ◽

Large Area ◽

Pressure Plasma

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Preparation and characterization DLC thin films using atmospheric pressure plasma Jet

IOP Conference Series Materials Science and Engineering ◽

10.1088/1757-899x/454/1/012065 ◽

2018 ◽

Vol 454 ◽

pp. 012065

Author(s):

A A Abbass ◽

S J Kadhem

Keyword(s):

Thin Films ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Pressure Plasma

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Deposition of thin films on glass fiber fabrics by atmospheric pressure plasma jet

Surface and Coatings Technology ◽

10.1016/j.surfcoat.2020.126498 ◽

2020 ◽

Vol 404 ◽

pp. 126498

Author(s):

Ming Gao ◽

Yu Wang ◽

Yongliang Zhang ◽

Ying Li ◽

Yao Tang ◽

...

Keyword(s):

Thin Films ◽

Glass Fiber ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Pressure Plasma

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Particle formation during deposition of SiO x nanostructured thin films by atmospheric pressure plasma jet

Japanese Journal of Applied Physics ◽

10.35848/1347-4065/ab72ca ◽

2020 ◽

Vol 59 (SH) ◽

pp. SHHE06 ◽

Cited By ~ 2

Author(s):

Y. A. Ussenov ◽

L. Hansen ◽

T. Krüger ◽

T.S. Ramazanov ◽

H. Kersten

Keyword(s):

Thin Films ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Particle Formation ◽

Atmospheric Pressure Plasma Jet ◽

Nanostructured Thin Films ◽

Pressure Plasma

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Novel thin films deposited on electrospun PCL scaffolds by atmospheric pressure plasma jet for L929 fibroblast cell cultivation

Journal of Physics D Applied Physics ◽

10.1088/0022-3727/49/47/474002 ◽

2016 ◽

Vol 49 (47) ◽

pp. 474002 ◽

Cited By ~ 10

Author(s):

M Gozutok ◽

A Baitukha ◽

F Arefi-Khonsari ◽

H Turkoglu Sasmazel

Keyword(s):

Thin Films ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Fibroblast Cell ◽

Atmospheric Pressure Plasma Jet ◽

Cell Cultivation ◽

Pressure Plasma ◽

L929 Fibroblast

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Electrochromic Ni–Fe oxide thin films synthesized by an atmospheric pressure plasma jet for flexible electrochromic application

Thin Solid Films ◽

10.1016/j.tsf.2014.05.064 ◽

2014 ◽

Vol 570 ◽

pp. 394-403 ◽

Cited By ~ 1

Author(s):

Yun-Sen Lin ◽

Pei-Ying Chuang ◽

Ping-Shiun Shie

Keyword(s):

Thin Films ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Oxide Thin Films ◽

Fe Oxide ◽

Pressure Plasma

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Development of a radio frequency atmospheric pressure plasma jet for diamond-like carbon coatings on stainless steel substrates

Applied Physics A ◽

10.1007/s00339-016-0414-z ◽

2016 ◽

Vol 122 (10) ◽

Cited By ~ 5

Author(s):

F. Sohbatzadeh ◽

O. Samadi ◽

S. N. Siadati ◽

G. R. Etaati ◽

E. Asadi ◽

...

Keyword(s):

Stainless Steel ◽

Radio Frequency ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Diamond Like Carbon ◽

Atmospheric Pressure Plasma Jet ◽

Carbon Coatings ◽

Pressure Plasma ◽

Steel Substrates

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Detection of atomic oxygen and nitrogen created in a radio-frequency-driven micro-scale atmospheric pressure plasma jet using mass spectrometry

Plasma Physics and Controlled Fusion ◽

10.1088/0741-3335/54/12/124046 ◽

2012 ◽

Vol 54 (12) ◽

pp. 124046 ◽

Cited By ~ 26

Author(s):

D Maletić ◽

N Puač ◽

S Lazović ◽

G Malović ◽

T Gans ◽

...

Keyword(s):

Mass Spectrometry ◽

Radio Frequency ◽

Atmospheric Pressure ◽

Atomic Oxygen ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Micro Scale ◽

Pressure Plasma

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Conversion of dense and continuous nickel oxide compound thin films using nitrogen DC-pulse atmospheric-pressure plasma jet

Ceramics International ◽

10.1016/j.ceramint.2019.07.224 ◽

2019 ◽

Vol 45 (17) ◽

pp. 22078-22084 ◽

Cited By ~ 3

Author(s):

Jui-Hsuan Tsai ◽

Shu-Ming Hsu ◽

I-Chun Cheng ◽

Cheng-Che Hsu ◽

Jian-Zhang Chen

Keyword(s):

Thin Films ◽

Nickel Oxide ◽

Atmospheric Pressure ◽

Atmospheric Pressure Plasma ◽

Plasma Jet ◽

Atmospheric Pressure Plasma Jet ◽

Oxide Compound ◽

Pressure Plasma

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