One-shot current conserving quantum transport modeling of phonon scattering in n-type double-gate field-effect-transistors

2013 ◽  
Vol 102 (1) ◽  
pp. 013508 ◽  
Author(s):  
Nicolas Cavassilas ◽  
Marc Bescond ◽  
Hector Mera ◽  
Michel Lannoo
Keyword(s):  
Quantum Transport ◽  
Field Effect ◽  
Phonon Scattering ◽  
Field Effect Transistors ◽  
Transport Modeling ◽  
Double Gate

Double‐Gate MoS 2 Field‐Effect Transistors with Full‐Range Tunable Threshold Voltage for Multifunctional Logic Circuits

2021 ◽  
pp. 2101036
Author(s):  
Jiali Yi ◽  
Xingxia Sun ◽  
Chenguang Zhu ◽  
Shengman Li ◽  
Yong Liu ◽  
...  
Keyword(s):  
Threshold Voltage ◽  
Field Effect ◽  
Field Effect Transistors ◽  
Full Range ◽  
Logic Circuits ◽  
Double Gate

High-Mobility SiC MOSFETs with Alkaline Earth Interface Passivation

2016 ◽  
Vol 858 ◽  
pp. 671-676 ◽  
Author(s):  
Daniel J. Lichtenwalner ◽  
Vipindas Pala ◽  
Brett A. Hull ◽  
Scott Allen ◽  
John W. Palmour
Keyword(s):  
Nitric Oxide ◽  
Field Effect ◽  
Alkaline Earth ◽  
Phonon Scattering ◽  
Breakdown Strength ◽  
Field Effect Transistors ◽  
Oxide Semiconductor ◽  
Field Effect Mobility ◽  
Channel Mobility ◽  
Alkaline Earth Elements

Alkaline earth elements Sr and Ba provide SiO2/SiC interface conditions suitable for obtaining high channel mobility metal-oxide-semiconductor field-effect-transistors (MOSFETs) on the Si-face (0001) of 4H-SiC, without the standard nitric oxide (NO) anneal. The alkaline earth elements Sr and Ba located at/near the SiO2/SiC interface result in field-effect mobility (μFE) values as high as 65 and 110 cm2/V.s, respectively, on 5×1015 cm-3 Al-doped p-type SiC. As the SiC doping increases, peak mobility decreases as expected, but the peak mobility remains higher for Ba interface layer (Ba IL) devices compared to NO annealed devices. The Ba IL MOSFET field-effect mobility decreases as the temperature is increased to 150 °C, as expected when mobility is phonon-scattering-limited, not interface-trap-limited. This is in agreement with measurements of the interface state density (DIT) using the high-low C-V technique, indicating that the Ba IL results in lower DIT than that of samples with nitric oxide passivation. Vertical power MOSFET (DMOSFET) devices (1200V, 15A) fabricated with the Ba IL have a 15% lower on-resistance compared to devices with NO passivation. The DMOSFET devices with a Ba IL maintain a stable threshold voltage under NBTI stress conditions of-15V gate bias stress, at 150 °C for 100hrs, indicating no mobile ions. Secondary-ion mass-spectrometry (SIMS) analysis confirms that the Sr and Ba remain predominantly at the SiO2/SiC interface, even after high temperature oxide annealing, consistent with the observed high channel mobility after these anneals. The alkaline earth elements result in enhanced SiC oxidation rate, and the resulting gate oxide breakdown strength is slightly reduced compared to NO annealed thermal oxides on SiC.

Controlling the threshold voltage of β-Ga2O3 field-effect transistors via remote fluorine plasma treatment

2019 ◽  
Vol 7 (29) ◽  
pp. 8855-8860 ◽  
Author(s):  
Janghyuk Kim ◽  
Marko J. Tadjer ◽  
Michael A. Mastro ◽  
Jihyun Kim
Keyword(s):  
Plasma Treatment ◽  
Threshold Voltage ◽  
Field Effect ◽  
Field Effect Transistors ◽  
Double Gate ◽  
Metal Insulator ◽  
Metal Insulator Semiconductor ◽  
Enhancement Mode ◽  
Mode Operation

The threshold voltage of β-Ga2O3 metal–insulator–semiconductor field-effect transistors is controlled via remote fluorine plasma treatment, enabling an enhancement-mode operation under double gate condition.

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