High performance La/B4C multilayer mirrors with barrier layers for the next generation lithography
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2009 ◽
Vol 129
(3)
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pp. 393-398
2019 ◽
2015 ◽
Vol 2015
(6)
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pp. 4066-4077
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2000 ◽
Vol 18
(4)
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pp. 1119-1124
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Keyword(s):
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