LaAlO3/Si capacitors: Comparison of different molecular beam deposition conditions and their impact on electrical properties

2013 ◽  
Vol 113 (3) ◽  
pp. 034106 ◽  
Author(s):  
Sylvain Pelloquin ◽  
Guillaume Saint-Girons ◽  
Nicolas Baboux ◽  
David Albertini ◽  
Waël Hourani ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Molecular Beam ◽  
Molecular Beam Deposition ◽  
Beam Deposition ◽  
Deposition Conditions

Structural Characterization of Fullerene thin Films Fabricated by Organic Molecular Beam Deposition

1994 ◽  
Vol 359 ◽  
Author(s):  
Kiyoshi Yase ◽  
Takuya Saraya ◽  
Kazuhiro Kudo
Keyword(s):  
Molecular Beam ◽  
Substrate Surface ◽  
Alkali Halides ◽  
Thin Solid Films ◽  
Solid Films ◽  
Molecular Beam Deposition ◽  
Temperature Controlled ◽  
Beam Deposition ◽  
Deposition Conditions

ABSTRACTFullerene C60 thin solid films have been fabricated on the (001) surfaces of alkali halides (NaCl, KCI and KBr) and muscovite by organic molecular beam deposition (OMBD) technique. Pure C60 powder was sublimated from the precisely temperature-controlled K-cell at low pressure (10−7 Torr) and deposited onto the substrates kept in the range 125 –300 °C. Increasing both the temperature of K-cell and the substrate temperature, fine crystals grow with different size, shape and distance between neighbors. The dependence of the size and density of island crystals on the deposition conditions revealed the mechanism of crystal growth and the effect of interaction between molecules and substrate surface.

Structure and electrical properties of polycrystalline SiGe films grown by molecular beam deposition

2007 ◽  
Vol 41 (3) ◽  
pp. 341-344 ◽  
Author(s):  
I. B. Chistokhin ◽  
A. K. Gutakovskiĭ ◽  
A. S. Deryabin
Keyword(s):  
Electrical Properties ◽  
Molecular Beam ◽  
Molecular Beam Deposition ◽  
Beam Deposition

Electrical Properties of LaLuO3/Si(100) Structures Prepared by Molecular Beam Deposition

2019 ◽  
Vol 33 (3) ◽  
pp. 221-227
Author(s):  
Yuri Y. Gomeniuk ◽  
Yuri V. Gomeniuk ◽  
Alexei N. Nazarov ◽  
Paul K. Hurley ◽  
Karim Cherkaoui ◽  
...  
Keyword(s):  
Electrical Properties ◽  
Molecular Beam ◽  
Molecular Beam Deposition ◽  
Beam Deposition
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