Metal etching with reactive gas cluster ion beams using pickup cell

2012 ◽  
Author(s):  
Noriaki Toyoda ◽  
Isao Yamada
Keyword(s):  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Metal Etching ◽  
Reactive Gas

Cluster Size Dependence of Etching by Reactive Gas Cluster Ion Beams

2008 ◽  
Author(s):  
Noriaki Toyoda ◽  
Iaso Yamada ◽  
Edmund G. Seebauer ◽  
Susan B. Felch ◽  
Amitabh Jain ◽  
...  
Keyword(s):  
Cluster Size ◽  
Size Dependence ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Reactive Gas

Cu pattern etching by oxygen gas cluster ion beams with acetic acid vapor

2014 ◽  
Author(s):  
N. Toyoda ◽  
M. Kojima ◽  
R. Hinoura ◽  
A. Yamaguchi ◽  
K. Hara ◽  
...  
Keyword(s):  
Acetic Acid ◽  
Ion Beams ◽  
Acid Vapor ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Oxygen Gas

Morphology dependence of surface smoothing of Ar gas cluster ion beams

2005 ◽  
pp. 241-244
Author(s):  
S. Houzumi ◽  
T. Mashita ◽  
N. Toyoda ◽  
K. Mochiji ◽  
T. Mitamura ◽  
...  
Keyword(s):  
Ion Beams ◽  
Surface Smoothing ◽  
Cluster Ion Beams ◽  
Cluster Ion ◽  
Ar Gas

Surface modifications by gas cluster ion beams

1996 ◽  
pp. 165-169
Author(s):  
I. Yamada ◽  
J. Matsuo ◽  
Z. Insepov ◽  
M. Akizuki
Keyword(s):  
Surface Modifications ◽  
Ion Beams ◽  
Cluster Ion Beams ◽  
Cluster Ion
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