Hydrogen passivation of polycrystalline silicon thin films

2012 ◽  
Vol 112 (6) ◽  
pp. 063711 ◽  
Author(s):  
L.-P. Scheller ◽  
M. Weizman ◽  
P. Simon ◽  
M. Fehr ◽  
N. H. Nickel
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Hydrogen Passivation ◽  
Silicon Thin Films

Defects generation by hydrogen passivation of polycrystalline silicon thin films

Solar Energy ◽  
2006 ◽  
Vol 80 (6) ◽  
pp. 653-657 ◽  
Author(s):  
S. Honda ◽  
T. Mates ◽  
M. Ledinský ◽  
A. Fejfar ◽  
J. Kočka ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Hydrogen Passivation ◽  
Silicon Thin Films

Hydrogen passivation of grain boundary defects in polycrystalline silicon thin films

1993 ◽  
Vol 62 (25) ◽  
pp. 3285-3287 ◽  
Author(s):  
N. H. Nickel ◽  
N. M. Johnson ◽  
W. B. Jackson
Keyword(s):  
Thin Films ◽  
Grain Boundary ◽  
Polycrystalline Silicon ◽  
Hydrogen Passivation ◽  
Silicon Thin Films

Effect of hydrogen passivation on polycrystalline silicon thin films

2005 ◽  
Vol 487 (1-2) ◽  
pp. 152-156 ◽  
Author(s):  
S. Honda ◽  
T. Mates ◽  
M. Ledinsky ◽  
J. Oswald ◽  
A. Fejfar ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Hydrogen Passivation ◽  
Silicon Thin Films

In situ excimer laser irradiation as cleaning tool for solid phase epitaxy of laser crystallized polycrystalline silicon thin films

2013 ◽  
Vol 210 (12) ◽  
pp. 2729-2735 ◽  
Author(s):  
Ingmar Höger ◽  
Thomas Schmidt ◽  
Anja Landgraf ◽  
Martin Schade ◽  
Annett Gawlik ◽  
...  
Keyword(s):  
Thin Films ◽  
Laser Irradiation ◽  
Excimer Laser ◽  
Polycrystalline Silicon ◽  
Solid Phase ◽  
Solid Phase Epitaxy ◽  
Silicon Thin Films ◽  
Excimer Laser Irradiation

Heat Treatment of Amorphous and Polycrystalline Silicon Thin Films with High-Pressure H2O Vapor

1998 ◽  
Vol 37 (Part 1, No. 8) ◽  
pp. 4254-4257 ◽  
Author(s):  
Toshiyuki Sameshima ◽  
Mitsuru Satoh ◽  
Keiji Sakamoto ◽  
Kentaro Ozaki ◽  
Keiko Saitoh
Keyword(s):  
Thin Films ◽  
Heat Treatment ◽  
High Pressure ◽  
Polycrystalline Silicon ◽  
Silicon Thin Films

Charge Assisted Deposition of Polycrystalline Silicon Thin Films by Cesium Sputter Ion Beam Deposition

2004 ◽  
Vol 43 (10) ◽  
pp. 6880-6883 ◽  
Author(s):  
Deuk Yeon Lee ◽  
Yong Hwan Kim ◽  
In Kyo Kim ◽  
Dong Joon Choi ◽  
Soon Moon Jeong ◽  
...  
Keyword(s):  
Thin Films ◽  
Polycrystalline Silicon ◽  
Ion Beam ◽  
Ion Beam Deposition ◽  
Silicon Thin Films ◽  
Beam Deposition
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