Shear dependent nonlinear vibration in a high quality factor single crystal silicon micromechanical resonator

2012 ◽  
Vol 101 (3) ◽  
pp. 034102 ◽  
Author(s):  
H. Zhu ◽  
G. C. Shan ◽  
C. H. Shek ◽  
J. E.-Y. Lee
Keyword(s):  
Single Crystal ◽  
Nonlinear Vibration ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
High Quality Factor ◽  
High Quality ◽  
Crystal Silicon

Quality factor optimization of composite piezoelectric single-crystal silicon MEMS resonators

2015 ◽  
Author(s):  
Ossama Mortada ◽  
Pierre Blondy ◽  
Jean-Christophe Orlianges ◽  
Matthieu Chatras ◽  
Aurelian Crunteanu
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Mems Resonators

scholarly journals High quality-factor optical nanocavities in bulk single-crystal diamond

2014 ◽  
Vol 5 (1) ◽  
Author(s):  
Michael J. Burek ◽  
Yiwen Chu ◽  
Madelaine S. Z. Liddy ◽  
Parth Patel ◽  
Jake Rochman ◽  
...  
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
High Quality Factor ◽  
Bulk Single Crystal ◽  
High Quality ◽  
Single Crystal Diamond

Highly decoupled single-crystal silicon resonators: an approach for the intrinsic quality factor

2006 ◽  
Vol 16 (6) ◽  
pp. S45-S53 ◽  
Author(s):  
Baptiste Le Foulgoc ◽  
Tarik Bourouina ◽  
Olivier Le Traon ◽  
Alain Bosseboeuf ◽  
Frédéric Marty ◽  
...  
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
Single Crystal Silicon ◽  
Crystal Silicon ◽  
Intrinsic Quality ◽  
Silicon Resonators

High-quality cutting of polished single-crystal silicon by wire electrical discharge machining

2005 ◽  
Vol 29 (4) ◽  
pp. 423-430 ◽  
Author(s):  
Hideo Takino ◽  
Toshimitsu Ichinohe ◽  
Katsunori Tanimoto ◽  
Syuichi Yamaguchi ◽  
Kazushi Nomura ◽  
...  
Keyword(s):  
Single Crystal ◽  
Electrical Discharge ◽  
Electrical Discharge Machining ◽  
Single Crystal Silicon ◽  
Wire Electrical Discharge Machining ◽  
High Quality ◽  
Crystal Silicon

Surface effects and high quality factors in ultrathin single-crystal silicon cantilevers

2000 ◽  
Vol 77 (23) ◽  
pp. 3860-3862 ◽  
Author(s):  
Jinling Yang ◽  
Takahito Ono ◽  
Masayoshi Esashi
Keyword(s):  
Single Crystal ◽  
Single Crystal Silicon ◽  
Surface Effects ◽  
Quality Factors ◽  
High Quality ◽  
Crystal Silicon

scholarly journals High quality factor single-crystal diamond mechanical resonators

2012 ◽  
Vol 101 (16) ◽  
pp. 163505 ◽  
Author(s):  
P. Ovartchaiyapong ◽  
L. M. A. Pascal ◽  
B. A. Myers ◽  
P. Lauria ◽  
A. C. Bleszynski Jayich
Keyword(s):  
Single Crystal ◽  
Quality Factor ◽  
High Quality Factor ◽  
Mechanical Resonators ◽  
High Quality ◽  
Single Crystal Diamond
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