Study of thin film production of ceramic ZrO[sub 2] on silicon wafer using second harmonic Nd-Yag laser with pulsed laser deposition technique
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2019 ◽
Vol 481
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pp. 120-124
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2000 ◽
Vol 68
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pp. 254-259
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2015 ◽
Vol 138
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pp. 1-8
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pp. 24
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