The charge trapping characteristics of Si3N4 and Al2O3 layers on amorphous-indium-gallium-zinc oxide thin films for memory application

Ji Sim Jung; Sang-Ho Rha; Un Ki Kim; Yoon Jang Chung; Yoon Soo Jung; Jung-Hae Choi; Cheol Seong Hwang

doi:10.1063/1.4711202

The charge trapping characteristics of Si3N4 and Al2O3 layers on amorphous-indium-gallium-zinc oxide thin films for memory application

Applied Physics Letters ◽

10.1063/1.4711202 ◽

2012 ◽

Vol 100 (18) ◽

pp. 183503 ◽

Cited By ~ 15

Author(s):

Ji Sim Jung ◽

Sang-Ho Rha ◽

Un Ki Kim ◽

Yoon Jang Chung ◽

Yoon Soo Jung ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Charge Trapping ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Indium Gallium

Download Full-text

Observation of decreasing resistivity of amorphous indium gallium zinc oxide thin films with an increasing oxygen partial pressure

Journal of Applied Physics ◽

10.1063/1.4974850 ◽

2017 ◽

Vol 121 (4) ◽

pp. 045305 ◽

Cited By ~ 1

Author(s):

Anup K. Singh ◽

Sonachand Adhikari ◽

Rajeev Gupta ◽

Deepak

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Oxygen Partial Pressure ◽

Partial Pressure ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Indium Gallium

Download Full-text

P‐15: Thermal Conductivity Measurement of Indium‐Gallium‐Zinc‐Oxide Thin Films Utilizing Three‐Omega Method

SID Symposium Digest of Technical Papers ◽

10.1002/sdtp.14138 ◽

2020 ◽

Vol 51 (1) ◽

pp. 1365-1368

Author(s):

Rauf Khan ◽

Shim Chang-Hoon ◽

Reiji Hattori

Keyword(s):

Thin Films ◽

Thermal Conductivity ◽

Zinc Oxide ◽

Conductivity Measurement ◽

Thermal Conductivity Measurement ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Omega Method ◽

Indium Gallium ◽

Three Omega Method

Download Full-text

Effects of bombardment of negative oxygen ions on amorphous indium gallium zinc oxide thin films by superimposed rf/dc magnetron sputtering

Applied Physics Express ◽

10.7567/apex.7.031401 ◽

2014 ◽

Vol 7 (3) ◽

pp. 031401 ◽

Cited By ~ 6

Author(s):

DooHyun Kim ◽

JinNyoung Jang ◽

SooBok Yoon ◽

MunPyo Hong

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Magnetron Sputtering ◽

Indium Gallium Zinc Oxide ◽

Dc Magnetron Sputtering ◽

Oxide Thin Films ◽

Oxygen Ions ◽

Indium Gallium

Download Full-text

Dry Etching Characteristics of Amorphous Indium-Gallium-Zinc-Oxide Thin Films

Plasma Science and Technology ◽

10.1088/1009-0630/14/10/11 ◽

2012 ◽

Vol 14 (10) ◽

pp. 915-918 ◽

Cited By ~ 3

Author(s):

Yanbin Zheng ◽

Guang Li ◽

Wenlong Wang ◽

Xiuchang Li ◽

Zhigang Jiang

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Dry Etching ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Indium Gallium

Download Full-text

Sensing Properties of Indium-Gallium-Zinc-Oxide Thin Films under the Influence of Thickness and Annealing Ambient

Journal of The Electrochemical Society ◽

10.1149/1945-7111/ac0603 ◽

2021 ◽

Author(s):

Sunil Babu Eadi ◽

Hyun Jin Shin ◽

Ki-Woo Song ◽

Hyun Woong Choi ◽

Hi Deok Lee

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Sensing Properties ◽

Indium Gallium

Download Full-text

Effects of electron-beam irradiation on structural, electrical, and optical properties of amorphous indium gallium zinc oxide thin films

Current Applied Physics ◽

10.1016/j.cap.2014.08.022 ◽

2014 ◽

Vol 14 (11) ◽

pp. 1591-1595 ◽

Cited By ~ 11

Author(s):

Kiseok Jeon ◽

Seung Wook Shin ◽

Jaeseung Jo ◽

Myung Sang Kim ◽

Jae Cheol Shin ◽

...

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Electron Beam ◽

Electron Beam Irradiation ◽

Indium Gallium Zinc Oxide ◽

Beam Irradiation ◽

Oxide Thin Films ◽

Electrical And Optical Properties ◽

Indium Gallium

Download Full-text

Effect of O 2 plasma immersion on electrical properties and transistor performance of indium gallium zinc oxide thin films

Thin Solid Films ◽

10.1016/j.tsf.2013.07.084 ◽

2013 ◽

Vol 545 ◽

pp. 533-536 ◽

Cited By ~ 14

Author(s):

P. Liu ◽

T.P. Chen ◽

Z. Liu ◽

C.S. Tan ◽

K.C. Leong

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Electrical Properties ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Indium Gallium

Download Full-text

Optical properties of amorphous-like indium zinc oxide and indium gallium zinc oxide thin films

Thin Solid Films ◽

10.1016/j.tsf.2011.10.194 ◽

2012 ◽

Vol 520 (14) ◽

pp. 4722-4725 ◽

Cited By ~ 31

Author(s):

A.C. Galca ◽

G. Socol ◽

V. Craciun

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Indium Zinc Oxide ◽

Indium Gallium

Download Full-text

Thickness Dependence of Optical Properties of Amorphous Indium Gallium Zinc Oxide Thin Films: Effects of Free-Electrons and Quantum Confinement

ECS Solid State Letters ◽

10.1149/2.0031504ssl ◽

2015 ◽

Vol 4 (3) ◽

pp. P29-P32 ◽

Cited By ~ 8

Author(s):

X. D. Li ◽

S. Chen ◽

T. P. Chen ◽

Y. Liu

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Optical Properties ◽

Quantum Confinement ◽

Thickness Dependence ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Free Electrons ◽

Indium Gallium

Download Full-text

Effects of Ion Implantation Doping on the Characteristics of Amorphous Indium Gallium Zinc Oxide Thin Films

Science of Advanced Materials ◽

10.1166/sam.2016.2477 ◽

2016 ◽

Vol 8 (2) ◽

pp. 267-271

Author(s):

Young Jin Kim ◽

Jae Chul Park ◽

Ho-Nyeon Lee

Keyword(s):

Thin Films ◽

Zinc Oxide ◽

Ion Implantation ◽

Indium Gallium Zinc Oxide ◽

Oxide Thin Films ◽

Indium Gallium

Download Full-text