Large area Co nanoring arrays fabricated on silicon substrate by anodic aluminum oxide template-assisted electrodeposition

2012 ◽  
Vol 100 (18) ◽  
pp. 183101 ◽  
Author(s):  
Y. L. Li ◽  
S. L Tang ◽  
W. B. Xia ◽  
L. Y. Chen ◽  
Y. Wang ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum Oxide Template ◽  
Large Area ◽  
Anodic Aluminum

Fabrication of Anodic Aluminum Oxide Film on Large-Area Glass Substrate

2007 ◽  
Vol 10 (12) ◽  
pp. C69 ◽  
Author(s):  
Ching-Jung Yang ◽  
Shih-Wei Liang ◽  
Pu-Wei Wu ◽  
Chih Chen ◽  
Jia-Min Shieh
Keyword(s):  
Oxide Film ◽  
Aluminum Oxide ◽  
Glass Substrate ◽  
Anodic Aluminum Oxide ◽  
Large Area ◽  
Anodic Aluminum Oxide Film ◽  
Aluminum Oxide Film ◽  
Anodic Aluminum

scholarly journals Formation of MoS2 nanostructure arrays using anodic aluminum oxide template

2020 ◽  
Vol 9 ◽  
pp. 100071
Author(s):  
Takaki Okamoto ◽  
Tomohiro Shimizu ◽  
Koichi Takase ◽  
Takeshi Ito ◽  
Shoso Shingubara
Keyword(s):  
Aluminum Oxide ◽  
Anodic Aluminum Oxide ◽  
Anodic Aluminum Oxide Template ◽  
Anodic Aluminum ◽  
Nanostructure Arrays

Fabrication and characteristics of the high-sensitivity humidity sensor of anodic aluminum oxide based on silicon substrates

2018 ◽  
Vol 32 (16) ◽  
pp. 1850199 ◽  
Author(s):  
Degao Lan ◽  
Xiaofeng Zhao ◽  
Fei Wang ◽  
Chunpeng Ai ◽  
Dianzhong Wen ◽  
...  
Keyword(s):  
Aluminum Oxide ◽  
Silicon Substrate ◽  
Anodic Aluminum Oxide ◽  
Nonlinear Response ◽  
Humidity Sensor ◽  
High Sensitivity ◽  
Silicon Substrates ◽  
High Porosity ◽  
Interdigitated Electrodes ◽  
Anodic Aluminum

The humidity sensor based on silicon substrate is presented in this paper, which consists of anodic aluminum oxide (AAO) film and interdigitated electrodes. By using electro-chemical oxidizing technique, AAO film with high porosity is fabricated on the silicon substrate. Under optimal oxidization condition, pore diameter of 37–79 nm and depth about [Formula: see text]m is achieved. Interdigitated electrodes are fabricated on the top of AAO film by vacuum evaporation deposition method. The results show that the sensor has different nonlinear response in whole range of relative humidity (RH). Moreover, it has almost linear relationship between the capacitance and RH at high RH from 75% to 95%. The highest sensitivity is obtained 613 pF/%RH at 1 kHz, which is much higher than other frequencies.

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