Kinetic model for dependence of thin film stress on growth rate, temperature, and microstructure

2012 ◽  
Vol 111 (8) ◽  
pp. 083520 ◽  
Author(s):  
E. Chason ◽  
J. W. Shin ◽  
S. J. Hearne ◽  
L. B. Freund
Keyword(s):  
Thin Film ◽  
Growth Rate ◽  
Kinetic Model ◽  
Film Stress ◽  
Thin Film Stress

Kinetic model for thin film stress including the effect of grain growth

2018 ◽  
Vol 123 (18) ◽  
pp. 185305 ◽  
Author(s):  
Eric Chason ◽  
A. M. Engwall ◽  
Z. Rao ◽  
T. Nishimura
Keyword(s):  
Thin Film ◽  
Kinetic Model ◽  
Grain Growth ◽  
Film Stress ◽  
Thin Film Stress

scholarly journals Controlling Thin-Film Stress and Wrinkling during Perovskite Film Formation

2018 ◽  
Vol 3 (6) ◽  
pp. 1225-1232 ◽  
Author(s):  
Kevin A. Bush ◽  
Nicholas Rolston ◽  
Aryeh Gold-Parker ◽  
Salman Manzoor ◽  
Jakob Hausele ◽  
...  
Keyword(s):  
Thin Film ◽  
Film Formation ◽  
Film Stress ◽  
Thin Film Stress
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