Detection of reactions and changes in thin film morphology using stress measurements
1992 ◽
Vol 10
(4)
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pp. 1426-1441
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Keyword(s):
Keyword(s):
2013 ◽
Vol 13
(9)
◽
pp. 1861-1864
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2006 ◽
Vol 46
(1)
◽
pp. 79-101
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Keyword(s):