High-spatial-resolution quantum-well intermixing process in GaInAs/GaInAsP laser structure using pulsed-photoabsorption-induced disordering

2000 ◽  
Vol 87 (6) ◽  
pp. 2775-2779 ◽  
Author(s):  
T. K. Ong ◽  
O. Gunawan ◽  
B. S. Ooi ◽  
Y. L. Lam ◽  
Y. C. Chan ◽  
...  
1999 ◽  
Vol 607 ◽  
Author(s):  
A. Saher Helmy ◽  
A.C. Bryce ◽  
C.N. Ironside ◽  
J.S. Aitchison ◽  
J.H. Marsh ◽  
...  

AbstractIn this paper we shall discuss techniques for accurate, non-destructive, optical characterisation of structures fabricated using quantum well intermixing (QWI). Spatially resolved photoluminescence and Raman spectroscopy were used to characterise the lateral bandgap profiles produced by impurity free vacancy disordering (IFVD) technology. Different features were used to examine the spatial resolution of the intermixing process. Features include 1:1 gratings as well as isolated stripes. From the measurements, the spatial selectivity of IFVD could be identified, and was found to be ∼4.5 μm, in contrast with the spatial resolution of the process of sputtering induced intermixing, which was found to be ∼2.5 μm. In addition, PL measurements on 1:1 gratings fabricated using IFVD show almost complete suppression of intermixing dielectric cap gratings with periods less than 10 microns. Finally, some insight into the limitations and merits of PL and Raman for the precision characterisation of QWI will be presented.


2008 ◽  
Vol 600-603 ◽  
pp. 1305-1308
Author(s):  
Masanobu Yoshikawa ◽  
Masataka Murakami ◽  
Takaya Fujita ◽  
K. Inoue ◽  
K. Matsuda ◽  
...  

We have measured cathodoluminescence (CL) spectra in the vicinity of V-defects in InGaN single-quantum-well(SQW) films at nanometer level, using newly developed CL apparatus (SE-SEM-CL). From spectroscopic CL measurement, it has been found that the spectra change dramatically in the vicinity of V-defects in the region of £50nm. The SE-SEM-CL has a potential to detect the CL spectral variation at spatial resolution with £50nm.


Author(s):  
Mohammed A. Abdulmajid ◽  
Chao Chen ◽  
Tien K. Ng ◽  
Boon S. Ooi ◽  
Ahmad A. Al-Jabr

Sign in / Sign up

Export Citation Format

Share Document