Thermally induced changes in the optical properties of SiNx:H films deposited by the electron cyclotron resonance plasma method

F. L. Martı́nez; A. del Prado; I. Mártil; G. González-Dı́az; B. Selle; I. Sieber

doi:10.1063/1.371008

Thermally induced changes in the optical properties of SiNx:H films deposited by the electron cyclotron resonance plasma method

Journal of Applied Physics ◽

10.1063/1.371008 ◽

1999 ◽

Vol 86 (4) ◽

pp. 2055-2061 ◽

Cited By ~ 17

Author(s):

F. L. Martı́nez ◽

A. del Prado ◽

I. Mártil ◽

G. González-Dı́az ◽

B. Selle ◽

...

Keyword(s):

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Thermally Induced ◽

Plasma Method ◽

Induced Changes ◽

Resonance Plasma

Download Full-text

Deposition of low temperature Si-based insulators by the electron cyclotron resonance plasma method

Thin Solid Films ◽

10.1016/s0040-6090(97)00510-5 ◽

1998 ◽

Vol 317 (1-2) ◽

pp. 116-119 ◽

Cited By ~ 6

Author(s):

S Garcia ◽

J.M Martin ◽

I Martil ◽

M Fernandez ◽

G Gonzalez-Diaz

Keyword(s):

Low Temperature ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Method ◽

Resonance Plasma

Download Full-text

Optical Properties of c-Axis Oriented Ba2NaNb5O15 Thin Films Formed by Electron Cyclotron Resonance Plasma Sputtering

Journal of the Ceramic Society of Japan ◽

10.2109/jcersj.105.687 ◽

1997 ◽

Vol 105 (1224) ◽

pp. 687-689

Author(s):

Akira WATAZU ◽

Hiroshi MASUMOTO ◽

Yoichiro MASUDA ◽

Toshio HIRAI

Keyword(s):

Thin Films ◽

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Sputtering ◽

Resonance Plasma

Download Full-text

Properties of a-SiN x .: H films deposited at room temperature by the electron cyclotron resonance plasma method

Philosophical Magazine B ◽

10.1080/13642819608239130 ◽

1996 ◽

Vol 73 (3) ◽

pp. 487-502 ◽

Cited By ~ 24

Author(s):

S. Garcia ◽

J. M. Martin ◽

M. Fernandez ◽

I. Martil ◽

G. Gonzalez-diaz

Keyword(s):

Cyclotron Resonance ◽

Room Temperature ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Method ◽

Resonance Plasma

Download Full-text

Bonding configuration and density of defects of SiO[sub x]H[sub y] thin films deposited by the electron cyclotron resonance plasma method

Journal of Applied Physics ◽

10.1063/1.1626798 ◽

2003 ◽

Vol 94 (12) ◽

pp. 7462 ◽

Cited By ~ 16

Author(s):

E. San Andrés ◽

A. del Prado ◽

I. Mártil ◽

G. González-Dı́az ◽

D. Bravo ◽

...

Keyword(s):

Thin Films ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Method ◽

Bonding Configuration ◽

Resonance Plasma

Download Full-text

The structural and dielectric properties of SiOx/a-C,F/SiOx multi-layer thin films deposited by microwave electron cyclotron resonance plasma method

Thin Solid Films ◽

10.1016/j.tsf.2004.06.090 ◽

2005 ◽

Vol 472 (1-2) ◽

pp. 44-48 ◽

Cited By ~ 5

Author(s):

Y. Xin ◽

Z.Y. Ning ◽

C. Ye ◽

S.H. Xu ◽

J. Chen ◽

...

Keyword(s):

Thin Films ◽

Dielectric Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Method ◽

Resonance Plasma

Download Full-text

Electron cyclotron resonance plasma enhanced chemical vapour deposition and optical properties of SiOx thin films

Journal of Non-Crystalline Solids ◽

10.1016/s0022-3093(98)00362-7 ◽

1998 ◽

Vol 226 (1-2) ◽

pp. 58-66 ◽

Cited By ~ 21

Author(s):

Pavel V Bulkin ◽

Pieter L Swart ◽

Beatrys M Lacquet

Keyword(s):

Thin Films ◽

Optical Properties ◽

Chemical Vapour Deposition ◽

Cyclotron Resonance ◽

Vapour Deposition ◽

Electron Cyclotron Resonance ◽

Chemical Vapour ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Improvements of electrical and optical properties of GaAs by substrate bias application during electron‐cyclotron‐resonance plasma‐excited molecular beam epitaxy

Applied Physics Letters ◽

10.1063/1.101094 ◽

1989 ◽

Vol 54 (24) ◽

pp. 2419-2421 ◽

Cited By ~ 9

Author(s):

Naoto Kondo ◽

Yasushi Nanishi

Keyword(s):

Optical Properties ◽

Molecular Beam Epitaxy ◽

Cyclotron Resonance ◽

Molecular Beam ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Substrate Bias ◽

Electrical And Optical Properties ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

Optical properties of SiNx deposited by electron cyclotron resonance plasma-enhanced deposition

Optical Engineering ◽

10.1117/12.175695 ◽

1994 ◽

Vol 33 (9) ◽

pp. 2894 ◽

Cited By ~ 9

Author(s):

Pavel V. Bulkin

Keyword(s):

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Resonance Plasma

Download Full-text

OPTICAL PROPERTIES OF AMORPHOUS FLUORINATED CARBON FILMS PREPARED BY ELECTRON CYCLOTRON RESONANCE PLASMA

Acta Physica Sinica ◽

10.7498/aps.50.2017 ◽

2001 ◽

Vol 50 (10) ◽

pp. 2017

Author(s):

YE CHAO ◽

NING ZHAO-YUAN ◽

CHENG SHAN-HUA

Keyword(s):

Optical Properties ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Carbon Films ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Fluorinated Carbon ◽

Resonance Plasma

Download Full-text

Bonding structure and hydrogen content in silicon nitride thin films deposited by the electron cyclotron resonance plasma method

Thin Solid Films ◽

10.1016/j.tsf.2003.12.084 ◽

2004 ◽

Vol 459 (1-2) ◽

pp. 203-207 ◽

Cited By ~ 20

Author(s):

F.L Martı́nez ◽

R Ruiz-Merino ◽

A del Prado ◽

E San Andrés ◽

I Mártil ◽

...

Keyword(s):

Thin Films ◽

Silicon Nitride ◽

Hydrogen Content ◽

Cyclotron Resonance ◽

Electron Cyclotron Resonance ◽

Electron Cyclotron ◽

Electron Cyclotron Resonance Plasma ◽

Plasma Method ◽

Bonding Structure ◽

Resonance Plasma

Download Full-text