Role of the substrate strain in the sheet resistance stability of NiSi deposited on Si(100)
Keyword(s):
1997 ◽
Vol 12
(6)
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pp. 1661-1665
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Keyword(s):
1969 ◽
Vol 74
(18)
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pp. 4571-4580
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2017 ◽
Vol 47
(3)
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pp. 2120-2134
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Keyword(s):
2007 ◽
Vol 56
(12)
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pp. 1107-1110
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