scholarly journals Particle-in-cell simulations of hollow cathode enhanced capacitively coupled radio frequency discharges

2012 ◽  
Vol 19 (2) ◽  
pp. 023508 ◽  
Author(s):  
T. Lafleur ◽  
R. W. Boswell
Keyword(s):  
Radio Frequency ◽  
Hollow Cathode ◽  
Capacitively Coupled ◽  
Particle In Cell ◽  
Radio Frequency Discharges

Disparity between current and voltage driven capacitively coupled radio frequency discharges

2018 ◽  
Vol 27 (12) ◽  
pp. 125010 ◽  
Author(s):  
S Wilczek ◽  
J Trieschmann ◽  
J Schulze ◽  
Z Donkó ◽  
R P Brinkmann ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges

Impact of ion energies in Ar/H2 capacitively coupled radio frequency discharges on PEALD processes of titanium films

2018 ◽  
Vol 350 ◽  
pp. 740-744 ◽  
Author(s):  
Shinya Iwashita ◽  
Kazuki Denpoh ◽  
Takamichi Kikuchi ◽  
Yusuke Suzuki ◽  
Yuichiro Wagatsuma ◽  
...  
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Ion Energies ◽  
Radio Frequency Discharges

Field reversals in electrically asymmetric capacitively coupled radio-frequency discharges in hydrogen

2013 ◽  
Vol 46 (43) ◽  
pp. 435201 ◽  
Author(s):  
Sebastian Mohr ◽  
Edmund Schüngel ◽  
Julian Schulze ◽  
Uwe Czarnetzki
Keyword(s):  
Radio Frequency ◽  
Capacitively Coupled ◽  
Radio Frequency Discharges
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