Determination of the defect depth profile after saw cutting of GaAs wafers measured by positron annihilation

1998 ◽  
Vol 84 (4) ◽  
pp. 2255-2262 ◽  
Author(s):  
F. Börner ◽  
S. Eichler ◽  
A. Polity ◽  
R. Krause-Rehberg ◽  
R. Hammer ◽  
...  
2013 ◽  
Vol 117 (17) ◽  
pp. 5002-5008 ◽  
Author(s):  
Alexander Körner ◽  
Wasim Abuillan ◽  
Christina Deichmann ◽  
Fernanda F. Rossetti ◽  
Almut Köhler ◽  
...  

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