The interaction of atomic hydrogen with very thin amorphous hydrogenated silicon films analyzed using in situ real time infrared spectroscopy: Reaction rates and the formation of hydrogen platelets

1998 ◽  
Vol 84 (1) ◽  
pp. 489-495 ◽  
Author(s):  
A. von Keudell ◽  
J. R. Abelson
Keyword(s):  
Infrared Spectroscopy ◽  
Real Time ◽  
Atomic Hydrogen ◽  
Reaction Rates ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon

Advanced modeling for optical characterization of amorphous hydrogenated silicon films

2013 ◽  
Vol 541 ◽  
pp. 12-16 ◽  
Author(s):  
Daniel Franta ◽  
David Nečas ◽  
Lenka Zajíčková ◽  
Ivan Ohlídal ◽  
Jiří Stuchlík
Keyword(s):  
Optical Characterization ◽  
Silicon Films ◽  
Hydrogenated Silicon ◽  
Amorphous Hydrogenated Silicon

A method for real time detection of reaction endpoints using a moving window t-test of in situ time course data

2020 ◽  
Vol 5 (9) ◽  
pp. 1642-1646
Author(s):  
Elyse N. T. DiMaso ◽  
Robert W. Bondi ◽  
John Guo ◽  
Alexander G. O'Brien
Keyword(s):  
Fourier Transform ◽  
Infrared Spectroscopy ◽  
Real Time ◽  
Time Course ◽  
Test Method ◽  
Moving Window ◽  
Mid Infrared ◽  
Mid Infrared Spectroscopy ◽  
Time Course Data

In-line Fourier transform mid-infrared spectroscopy (FTIR) in combination with a moving window t-test method was used to determine the endpoint of a reaction with a highly inconsistent rate.

Sign in / Sign up

Export Citation Format

Share Document