scholarly journals Characterization of deep levels in n-type and semi-insulating 4H-SiC epitaxial layers by thermally stimulated current spectroscopy

2012 ◽  
Vol 111 (1) ◽  
pp. 014910 ◽  
Author(s):  
Peter G. Muzykov ◽  
Ramesh M. Krishna ◽  
Krishna C. Mandal
1995 ◽  
Vol 395 ◽  
Author(s):  
Z.C. Huang ◽  
J.C. Chen ◽  
D.B. Mott

ABSTRACTDeep levels in insulating GaN grown by metalorganic chemical vapor deposition have been studied using thermally stimulated current (TSC) and photocurrent (PC) spectroscopies. Five main traps were observed by TSC measurement in the as-grown undoped GaN in the range of 0-0.75 eV below the conduction band edge or above the valence band edge. Their activation energies were 0.11, 0.24, 0.36, 0.53 and 0.62 eV, respectively. PC measurements showed three deep levels located within the bandgap at 1.32, 1.70 and 2.36 eV, respectively. Furnace annealing was carried out on GaN for identifying all the observed deep levels. We have found that the 0.24, 0.36 and 0.53 eV traps were eliminated by annealing at 1000°C under N2for six hours, whereas the 0.62 eV trap density increased after annealing. The three deep levels detected by the PC measurement were not affected by annealing. The 1.70 eV trap, which is located at the midgap, does not seem to compensate with narrow donors. We attribute the 0.11 eV trap to surface states, and the 0.62 eV trap to nitrogen vacancies.


2003 ◽  
Vol 32 (3) ◽  
pp. 172-175
Author(s):  
Takenori Tanno ◽  
Ken Suto ◽  
Yutaka Oyama ◽  
Jun-Ichi Nishizawa

Author(s):  
P. Wei ◽  
M. Chicoine ◽  
S. Gujrathi ◽  
F. Schiettekatte ◽  
J.-N. Beaudry ◽  
...  

1998 ◽  
Vol 189-190 ◽  
pp. 435-438 ◽  
Author(s):  
Hiroshi Harima ◽  
Toshiaki Inoue ◽  
Shin-ichi Nakashima ◽  
Hajime Okumura ◽  
Yuuki Ishida ◽  
...  

Sign in / Sign up

Export Citation Format

Share Document