Understanding of the development of in-plane residual stress in sol-gel-derived metal oxide thin films

2012 ◽  
Vol 111 (1) ◽  
pp. 014901 ◽  
Author(s):  
Kentaro Ohno ◽  
Hiroaki Uchiyama ◽  
Hiromitsu Kozuka
Keyword(s):  
Thin Films ◽  
Residual Stress ◽  
Metal Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films

scholarly journals Correction: Tantalum(v) 1,3-propanediolate β-diketonate solution as a precursor to sol–gel derived, metal oxide thin films

RSC Advances ◽  
2020 ◽  
Vol 10 (53) ◽  
pp. 32102-32102
Author(s):  
Christopher Beale ◽  
Stefanie Hamacher ◽  
Alexey Yakushenko ◽  
Oumaima Bensaid ◽  
Sabine Willbold ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films

Correction for ‘Tantalum(v) 1,3-propanediolate β-diketonate solution as a precursor to sol–gel derived, metal oxide thin films’ by Christopher Beale et al., RSC Adv., 2020, 10, 13737–13748, DOI: 10.1039/D0RA02558E.

Comparison of In-Plane Stress Development in Sol–Gel- and Nanoparticle-Derived Mesoporous Metal Oxide Thin Films

Langmuir ◽  
2019 ◽  
Vol 35 (50) ◽  
pp. 16427-16437 ◽  
Author(s):  
Pascal Cop ◽  
Kevin Hess ◽  
Sebastian Werner ◽  
Rafael Meinusch ◽  
Bernd M. Smarsly ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Plane Stress ◽  
Sol Gel ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Stress Development ◽  
Mesoporous Metal ◽  
Mesoporous Metal Oxide

scholarly journals Tantalum(v) 1,3-propanediolate β-diketonate solution as a precursor to sol–gel derived, metal oxide thin films

RSC Advances ◽  
2020 ◽  
Vol 10 (23) ◽  
pp. 13737-13748 ◽  
Author(s):  
Christopher Beale ◽  
Stefanie Hamacher ◽  
Alexey Yakushenko ◽  
Oumaima Bensaid ◽  
Sabine Willbold ◽  
...  
Keyword(s):  
Thin Films ◽  
Metal Oxide ◽  
Sol Gel ◽  
Tantalum Oxide ◽  
Oxide Films ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Solution Deposition

Synthesis of tantalum(v) 1,3-propanediolate β-diketonate solution and use in photochemical solution deposition to form tantalum oxide films.

Low-Temperature Processing of Sol-Gel Derived Metal Oxide Thin Films using Supercritical Carbon Dioxide Fluid

2008 ◽  
Vol 1113 ◽  
Author(s):  
Hiroshi Uchida ◽  
Kaori Fujioka ◽  
Seiichiro Koda
Keyword(s):  
Thin Films ◽  
Carbon Dioxide ◽  
Supercritical Carbon Dioxide ◽  
Metal Oxide ◽  
Substrate Temperature ◽  
Sol Gel ◽  
Processing Temperature ◽  
Oxide Thin Films ◽  
Metal Oxide Thin Films ◽  
Supercritical Carbon

ABSTRACTWe demonstrate a novel technique using supercritical carbon dioxide (scCO2) fluid for lowering processing temperature of sol-gel-derived metal oxide thin films. The film processing was performed in a hot-wall closed vessel filled with scCO2 fluid. The effects of fluid temperature and additives on the sol-gel synthesis reaction under scCO2 fluid were also investigated. Precursor films of titanium dioxide (TiO2) prepared on silicon wafer and silica glass by sol-gel coating using Ti-alkoxide were converted to crystalline TiO2 (anatase) films successfully by treatment in scCO2 without additive agent at a fluid pressure of 15 MPa and at a substrate temperature of above 250°C, which is significantly lower than the processing temperature of conventional sol-gel deposition. Furthermore, additive agents such as water (H2O) and nitrogen-oxygen mixture (N2-O2) promoted the decomposition and crystallization of precursor films in scCO2 fluid to form the crystalline TiO2 (anatase) films at a substrate temperature at as low as 200°C although it also produced surface absorbates consisted of hydroxides on the film surface. The experimental results suggested that the hydrolysis and polymerization reactions of Ti-alkoxide in the precursor films were proceeded by the scCO2 processing to form titanium-oxygen (Ti-O) networks and that byproducts such as alcohols were removed from the resulting films.

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