Electron paramagnetic resonance imaging of the distribution of the single substitutional nitrogen impurity through polycrystalline diamond samples grown by chemical vapor deposition

1997 ◽  
Vol 82 (3) ◽  
pp. 1201-1204 ◽  
Author(s):  
D. F. Talbot-Ponsonby ◽  
M. E. Newton ◽  
J. M. Baker
Keyword(s):  
Electron Paramagnetic Resonance ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Chemical Vapor ◽  
Polycrystalline Diamond ◽  
Resonance Imaging ◽  
Paramagnetic Resonance ◽  
Electron Paramagnetic Resonance Imaging ◽  
Nitrogen Impurity ◽  
Electron Paramagnetic

Electron Paramagnetic Resonance Studies of Intrinsic Bonding Defects and Impurities in SiO2 Thin Solid Films

1985 ◽  
Vol 61 ◽  
Author(s):  
Robert N. Schwartz ◽  
Marion D. Clark ◽  
Walee Chamulitrat ◽  
Larry Kevan
Keyword(s):  
Electron Paramagnetic Resonance ◽  
Chemical Vapor Deposition ◽  
Vapor Deposition ◽  
Rf Sputtering ◽  
Chemical Vapor ◽  
Temperature Dependent ◽  
Paramagnetic Resonance ◽  
Pressure Chemical ◽  
Defects And Impurities ◽  
Electron Paramagnetic

ABSTRACTElectron paramagnetic resonance (EPR) spectroscopy has been used to identify paramagnetic intrinsic bonding defects and impurities in as-deposited thin solid SiO2 films. Thin films grown by E-beam vacuum deposition, RF sputtering, thermal oxidation of polysilicon, plasma enhanced chemical vapor deposition (PECVD), and low pressure chemical vapor deposition (LPCVD) techniques have been examined. Some of the growth techniques yield films that have paramagnetic centers similar to those found in bulk radiation-damaged vitreous SiO2. A new temperature dependent EPR center was observed in PECVD SiO2 films and has been assigned to trapped NO2. Slow-motional EPR lineshape theory was used to analyze the temperature dependent spectra.

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