Pressure dependence of dissociation fraction and optical emission characteristics in low-pressure inductively coupled N2-Ar plasmas
Keyword(s):
2001 ◽
Vol 34
(18)
◽
pp. 2854-2861
◽
2002 ◽
Vol 20
(1)
◽
pp. 251-264
◽
Keyword(s):
2010 ◽
Vol 19
(6)
◽
pp. 065001
◽
Keyword(s):
2015 ◽
2009 ◽