High temperature annealing effects on the electrical characteristics of C implanted Si
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2008 ◽
Vol 17
(4-5)
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pp. 502-505
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1999 ◽
Vol 43
(11)
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pp. 2075-2079
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1995 ◽
Vol 137
(1-4)
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pp. 277-283
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2008 ◽
Vol 100
(4)
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pp. 042020
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