Elemental distribution and oxygen deficiency of magnetron sputtered indium tin oxide films
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2003 ◽
Vol 21
(4)
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pp. 1351-1354
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2009 ◽
Vol 469
(4-6)
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pp. 313-317
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2013 ◽
Vol 2
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pp. Q59-Q64
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2016 ◽
Vol 3
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pp. 116408
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2005 ◽
Vol 23
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pp. 1173-1179
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